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Title: Lifetime of high-order thickness resonances of thin silicon membranes

Journal Article · · Ultrasonics

Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Solid-State Solar-Thermal Energy Conversion Center (S3TEC)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
SC0001299; FG02-09ER46577
OSTI ID:
1168081
Journal Information:
Ultrasonics, Related Information: S3TEC partners with Massachusetts Institute of Technology (lead); Boston College; Oak Ridge National Laboratory; Rensselaer Polytechnic Institute
Country of Publication:
United States
Language:
English

References (18)

Thin film resonator technology journal May 2005
Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses journal May 2009
Excitation of longitudinal and transverse coherent acoustic phonons in nanometer free-standing films of (001) Si journal March 2009
Lifetimes of Confined Acoustic Phonons in Ultrathin Silicon Membranes journal February 2013
Femtosecond spectroscopy of acoustic frequency combs in the 100-GHz frequency range in Al/Si membranes journal November 2013
Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators journal April 2003
Picosecond ultrasonic measurements of attenuation of longitudinal acoustic phonons in silicon journal November 2009
Intrinsic phonon relaxation times from first-principles studies of the thermal conductivities of Si and Ge journal February 2010
Onset of size effect in lattice thermal conductivity of thin films journal March 2013
Specular Scattering Probability of Acoustic Phonons in Atomically Flat Interfaces journal December 2009
Direct Measurement of Room-Temperature Nondiffusive Thermal Transport Over Micron Distances in a Silicon Membrane journal January 2013
Elastic Moduli of Silicon vs Hydrostatic Pressure at 25.0°C and − 195.8°C journal July 1964
Phonon attenuation and velocity measurements in transparent materials by picosecond acoustic interferometry journal April 1991
Hypersound damping in vitreous silica measured by picosecond acoustics journal March 2008
Wave scattering from rough surfaces journal December 1987
Reflection of electromagnetic waves from slightly rough surfaces journal August 1951
From the Casimir Limit to Phononic Crystals: 20 Years of Phonon Transport Studies Using Silicon-on-Insulator Technology journal May 2013
Direct Measurements of Surface Scattering in Si Nanosheets Using a Microscale Phonon Spectrometer: Implications for Casimir-Limit Predicted by Ziman Theory journal January 2014