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Title: Variable line spacing diffraction grating fabricated by direct write lithography for synchrotron beamline applications

Authors:
; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1167441
Report Number(s):
LBNL-6895E
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: SPIE 2014
Research Org:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION