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Title: Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

Excitation and ionization conditions in traveling ionization zones of high power impulse magnetron sputtering plasmas were investigated using fast camera imaging through interference filters. The images, taken in end-on and side on views using light of selected gas and target atom and ion spectral lines, suggest that ionization zones are regions of enhanced densities of electrons, and excited atoms and ions. Excited atoms and ions of the target material (Al) are strongly concentrated near the target surface. Images from the highest excitation energies exhibit the most localized regions, suggesting localized Ohmic heating consistent with double layer formation.
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Resource Type:
Journal Article
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Journal Name: Applied Physics Letters; Journal Volume: 103; Related Information: Journal Publication Date: 2013-07-31
Research Org:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
70 PLASMA PHYSICS AND FUSION TECHNOLOGY high power impulse magentron sputtering, plasma diagnostics, spectroscopy