skip to main content

Title: Fabrication of x-ray gratings by direct write mask-less lithography

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1165376
Report Number(s):
LBNL-6360E
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Conference
Resource Relation:
Conference: Optics and Photonics SPIE 2013
Research Org:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION