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Title: Fast electron microscopy via compressive sensing

Patent ·
OSTI ID:1165123
; ;

Various technologies described herein pertain to compressive sensing electron microscopy. A compressive sensing electron microscope includes a multi-beam generator and a detector. The multi-beam generator emits a sequence of electron patterns over time. Each of the electron patterns can include a plurality of electron beams, where the plurality of electron beams is configured to impart a spatially varying electron density on a sample. Further, the spatially varying electron density varies between each of the electron patterns in the sequence. Moreover, the detector collects signals respectively corresponding to interactions between the sample and each of the electron patterns in the sequence.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
8,907,280
Application Number:
13/622,943
OSTI ID:
1165123
Resource Relation:
Patent File Date: 2012 Sep 19
Country of Publication:
United States
Language:
English

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Cited By (2)

Mathematical image assembly in a scanning-type microscope patent April 2017
Reconstructing an image of a scene captured using a compressed sensing device patent August 2016

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