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Title: Drifting potential humps in ionization zones: the "propeller blades" of high power impulse magnetron sputtering

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1165082
Report Number(s):
LBNL-6464E
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 103; Related Information: Journal Publication Date: 2013-10-01
Research Org:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY high power impulse magentron sputtering, plasma diagnostics