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Title: Silicon nitride zoneplates and packaging for extreme ultraviolet instruments

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1165013
Report Number(s):
LBNL-6492E
Journal ID: ISSN 2166-2746
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics; Journal Volume: 31; Journal Issue: 6; Related Information: Journal Publication Date: November 2013
Publisher:
American Vacuum Society/AIP
Research Org:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE