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Title: EUV scatterometry-based measurement method for the determination of phase roughness

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1164381
Report Number(s):
LBNL-6516E
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Proc. SPIE; Journal Volume: 8880; Related Information: Journal Publication Date: Sept. 2013
Research Org:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE