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Title: Pupil shaping and coherence control in an EUV mask-imaging microscope

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1164380
Report Number(s):
LBNL-6515E
DOE Contract Number:
DE-AC02-05CH11231
Resource Type:
Journal Article
Resource Relation:
Journal Name: Proc. SPIE; Journal Volume: 8880; Related Information: Journal Publication Date: Sept. 2013
Research Org:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE