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Title: Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology

Authors:
; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1163413
DOE Contract Number:
AC36-08GO28308
Resource Type:
Journal Article
Resource Relation:
Journal Name: Solar Energy Materials and Solar Cells; Journal Volume: 129; Journal Issue: October 2014
Research Org:
National Renewable Energy Laboratory (NREL), Golden, CO.
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE Solar Energy - Photovoltaics