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Title: Thin Film Ni-Si Solid-state Reactions: Phase Formation Sequence on Amorphized Si

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1163017
Report Number(s):
BNL--106963-2014-JA
Journal ID: ISSN 2166-2746
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Sci. and Tech. B: Microelect. and Nanometer Structure; Journal Volume: 31; Journal Issue: 5
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English