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Title: Origin of Stress Gradients Induced in Capped, Copper Metallization

Authors:
Publication Date:
OSTI Identifier:
1162787
Report Number(s):
BNL--106733-2014-JA
Journal ID: ISSN 0003--6951
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 8
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English