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Title: Characterization of Threading Dislocations in PVT-Grown AlN Substrates via x-Ray Topography and Ray Tracing Simulation

Authors:
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Publication Date:
OSTI Identifier:
1162475
Report Number(s):
BNL--106419-2014-JA
Journal ID: ISSN 0361--5235
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Electronic Materials; Journal Volume: 43; Journal Issue: 4
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English