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Title: Atomic Layer Deposition of TiO2 on Surface Modified Nanoporous Low-k Films

Authors:
; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1162452
Report Number(s):
BNL--106396-2014-JA
Journal ID: ISSN 0743--7463
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Langmuir; Journal Volume: 29; Journal Issue: 39
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English