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Title: Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis

Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [4] ;  [2] ;  [5]
  1. Graz University of Technology, Institute for Electron Microscopy and Nanoanalysis
  2. University of Tennessee, Knoxville (UTK)
  3. ORNL
  4. Graz Centre for Electron Microscopy
  5. Graz University of Technology
Publication Date:
OSTI Identifier:
1162090
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: ACS Applied Materials & Interfaces; Journal Volume: 6; Journal Issue: 10
Research Org:
Oak Ridge National Laboratory (ORNL); Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
SC USDOE - Office of Science (SC)
Country of Publication:
United States
Language:
English