Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis
Journal Article
·
· ACS Applied Materials & Interfaces
- Graz University of Technology, Institute for Electron Microscopy and Nanoanalysis
- University of Tennessee, Knoxville (UTK)
- ORNL
- Graz Centre for Electron Microscopy
- Graz University of Technology
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- DE-AC05-00OR22725
- OSTI ID:
- 1162090
- Journal Information:
- ACS Applied Materials & Interfaces, Vol. 6, Issue 10; ISSN 1944--8244
- Country of Publication:
- United States
- Language:
- English
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