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Title: Rapid and highly compact purification for focused electron beam induced deposits: a low temperature approach using electron stimulated H2O reactions

Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [2] ;  [3] ;  [4] ;  [5]
  1. Graz Centre for Electron Microscopy
  2. Institute for Electron Microscopy and Nanoanalysis
  3. ORNL
  4. University of Tennessee, Knoxville (UTK)
  5. Graz University of Technology
Publication Date:
OSTI Identifier:
1162089
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Physical Chemistry C; Journal Volume: 118; Journal Issue: 25
Research Org:
Oak Ridge National Laboratory (ORNL); Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
SC USDOE - Office of Science (SC)
Country of Publication:
United States
Language:
English