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Title: Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays

Patent ·
OSTI ID:1160248

Described herein are printable structures and methods for making, assembling and arranging electronic devices. A number of the methods described herein are useful for assembling electronic devices where one or more device components are embedded in a polymer which is patterned during the embedding process with trenches for electrical interconnects between device components. Some methods described herein are useful for assembling electronic devices by printing methods, such as by dry transfer contact printing methods. Also described herein are GaN light emitting diodes and methods for making and arranging GaN light emitting diodes, for example for display or lighting systems.

Research Organization:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-07ER46471
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Number(s):
8,865,489
Application Number:
12/778,588
OSTI ID:
1160248
Resource Relation:
Patent File Date: 2010 May 12
Country of Publication:
United States
Language:
English

References (802)

Nanopore Technology for Biomedical Applications journal February 1999
Conformal contact and pattern stability of stamps used for soft lithography journal June 2000
Organic thin film transistor using silver electrodes by the ink-jet printing technology journal July 2007
Fabrication of periodic nanostructures by phase-controlled multiple-beam interference journal December 2003
Nanoscale organic transistors that use source/drain electrodes supported by high resolution rubber stamps journal February 2003
Organic TFT Array on a Paper Substrate journal October 2004
Medical device applications of nanostructured surfaces patent-application February 2005
Porous silica via colloidal crystallization journal October 1997
On the aging of oxygen plasma-treated polydimethylsiloxane surfaces journal June 1990
Method for fabricating self-assembling microstructures patent August 1996
Extreme bendability of single-walled carbon nanotube networks transferred from high-temperature growth substrates to plastic and their use in thin-film transistors journal June 2005
Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems journal April 2007
Inkjet printing as a deposition and patterning tool for polymers and inorganic particles journal January 2008
Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application December 2009
Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer journal May 1998
Langmuir−Blodgett Silver Nanowire Monolayers for Molecular Sensing Using Surface-Enhanced Raman Spectroscopy journal September 2003
Nature of multilayer steps on the {100} cleavage planes of MgO single crystals journal July 1997
Fabrication of submicrometer features on curved substrates by microcontact printing journal August 1995
A Large Area Flexible Array Sensors Using Screen Printing Technology journal June 2009
Optimal strategy for controlling linewidth on spherical focal surface arrays
  • Ruchhoeft, P.; Wolfe, J. C.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 6, p. 3185-3189 https://doi.org/10.1116/1.1319842
journal January 2000
Synthesis of branched 'nanotrees' by controlled seeding of multiple branching events journal May 2004
Alignable epitaxial liftoff of GaAs materials with selective deposition using polyimide diaphragms journal December 1991
Fabrication of photonic crystals for the visible spectrum by holographic lithography journal March 2000
Etchant Anisotropy Controls the Step Bunching Instability in KOH Etching of Silicon journal October 2004
Release Strategies For Making Transferable Semiconductor Structures, Devices And Device Components patent-application May 2008
Mesoporous silica with micrometer-scale designs journal January 1997
Thermal management of electronic components using synthetic diamond patent July 1997
Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication journal December 2005
Layer-by-Layer Assembly of Nanowires for Three-Dimensional, Multifunctional Electronics journal March 2007
Printable organic and polymeric semiconducting materials and devices journal January 1999
High-power laser diodes based on InGaAsP alloys journal June 1994
Manufacturing method for electric device patent-application April 2004
Structures, systems and methods for joining articles and materials and uses therefor patent-application October 2004
Paper-like electronic displays: Large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks journal April 2001
Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning patent-application January 2003
Method for plasma deposition on apertured substrates patent April 1993
SEMICONDUCTOR NANOWIRES AND NANOTUBES journal August 2004
Diamond film structure with high thermal conductivity patent June 1996
Omnidirectional Printing of Flexible, Stretchable, and Spanning Silver Microelectrodes journal March 2009
Soft lithographic fabrication of an image sensor array on a curved substrate
  • Jin, Hyun-Chul; Abelson, John R.; Erhardt, Martin K.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 5, p. 2548-2551 https://doi.org/10.1116/1.1795249
journal October 2004
Low-Temperature Solution-Phase Synthesis of Quantum Well Structured CdSe Nanoribbons journal May 2006
Shape control of CdSe nanocrystals journal March 2000
Soft Lithography journal August 1998
Etching of DLC films using a low intensity oxygen plasma jet journal April 2000
Effect of Mechanical and Electrical Stresses on the Performance of an a-Si:H TFT on Plastic Substrate journal January 2004
High-Conductivity Elastomeric Electronics journal March 2004
Geometry-Dependent Stripe Rearrangement Processes Induced by Strain on Preordered Microwrinkle Patterns journal August 2005
Mechanisms of reversible stretchability of thin metal films on elastomeric substrates journal May 2006
Method for forming thermal oxide film of silicon carbide semiconductor device patent July 2001
Decal Transfer Microlithography: A New Soft-Lithographic Patterning Method journal November 2002
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon journal December 1999
Film based addressable programmable electronic matrix articles and methods of manufacturing and using the same patent September 2002
Web process interconnect in electronic assemblies patent October 2002
Metalorganic vapor phase epitaxial growth of a high quality GaN film using an AlN buffer layer journal February 1986
Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication journal September 2005
Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI.sub.2 chalcopyrite compounds patent July 1983
Thin Film Deposition, Patterning, and Printing in Organic Thin Film Transistors journal October 2004
Farewell to Flatland journal July 2010
Control of Thickness and Orientation of Solution-Grown Silicon Nanowires journal February 2000
Stamp Collapse in Soft Lithography journal August 2005
Nanocomposites patent-application May 2004
Electro-optic displays, and methods for driving same patent September 2005
High-performance thin-film transistors using semiconductor nanowires and nanoribbons journal September 2003
Organic species that facilitate charge transfer to or from nanostructures patent-application September 2004
Microstructural defect characterisation of a-Si:H deposited by low temperature HW-CVD on paper substrates journal April 2006
Electronics using hybrid-molecular and mono-molecular devices journal November 2000
ZnO nanobelts grown on Si substrate journal July 2002
Advances in organic field-effect transistors journal November 2004
A printable form of silicon for high performance thin film transistors on plastic substrates journal June 2004
Thin film transistors for displays on plastic substrates journal August 2000
Metal nano-void photonic crystal for enhanced raman spectroscopy patent-application June 2006
Curved focal plane wide-field-of-view telescope design conference December 2002
Micromachined silicon suspended wires with submicrometric dimensions journal September 2001
Printable, Flexible and Stretchable Diamond for Thermal Management patent-application March 2010
Estimation of Sidewall Nonradiative Recombination in GaInAsP/InP Wire Structures Fabricated by Low Energy Electron-Cyclotron-Resonance Reactive-Ion-Beam-Etching journal June 1998
Thermal interface with silver-filled carbon nanotubes patent December 2006
Optimized Structural Designs for Stretchable Silicon Integrated Circuits journal December 2009
Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits journal December 1971
High-speed mechanically flexible single-crystal silicon thin-film transistors on plastic substrates journal June 2006
Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond journal April 2006
Nanowires for Integrated Multicolor Nanophotonics journal October 2004
Extreme selectivity in the lift‐off of epitaxial GaAs films journal December 1987
Device Physics of Solution-Processed Organic Field-Effect Transistors journal October 2005
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application February 2007
Self-organizing high-density single-walled carbon nanotube arrays from surfactant suspensions journal August 2004
Preferred methods for producing electrical circuit elements used to control an electronic display patent July 2002
High Weight Fraction Surfactant Solubilization of Single-Wall Carbon Nanotubes in Water journal February 2003
Methods for transferring elements from a template to a substrate patent April 2003
Strained Ga/sub x/In/sub 1-x/P/(AlGa)/sub 0.5/In/sub 0.5/P heterostructures and quantum-well laser diodes journal January 1994
Patterning of dielectric oxide thin layers by microcontact printing of self-assembled monolayers journal December 1995
Electrical Contacts to Molecular Layers by Nanotransfer Printing journal July 2003
Inorganic Semiconductors for Flexible Electronics journal August 2007
Diamond growth in a direct-current low-pressure supersonic plasmajet journal March 1997
High-Performance Carbon Nanotube Field-Effect Transistor With Tunable Polarities journal September 2005
Fabrication of high thermal conductivity arrays of carbon nanotubes and their composites patent-application December 2006
4 W single-transverse mode VECSEL utilising intra-cavity diamond heat spreader journal January 2006
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus journal October 2003
Method for Producing at Least One Multilayer Body, and Multilayer Body patent-application November 2009
Shape Selective Growth of CdS One-Dimensional Nanostructures by a Thermal Evaporation Process journal March 2006
Fabrication of Ordered Diamond/metal Nanocomposite Structures journal October 2000
Electrical Characterization of Polymer-Based FETs Fabricated by Spin-Coating Poly(3-alkylthiophene)s journal November 2004
Ultrahigh-Density Nanowire Lattices and Circuits journal March 2003
Method for Forming Nanostructure Having High Aspect Ratio and Method for Forming Nanopattern Using the Same patent-application January 2008
Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers
  • Linder, S.; Baltes, H.; Gnaedinger, F.
  • Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems https://doi.org/10.1109/MEMSYS.1994.556165
conference January 1994
Rubber Stamping for Plastic Electronics and Fiber Optics journal July 2001
Metal–insulator–semiconductor electrostatics of carbon nanotubes journal August 2002
Nanoimprint lithography patent June 1998
Wafer-Scale Assembly of Highly Ordered Semiconductor Nanowire Arrays by Contact Printing journal January 2008
Deformable organic devices patent-application October 2005
Vertical scaling of carbon nanotube field-effect transistors using top gate electrodes journal May 2002
Full panel electronic packaging structure and method of making same patent August 1988
Effects of uniaxial stress on the electroreflectance spectrum of Ge and GaAs journal February 1977
Block copolymers as photonic bandgap materials journal November 1999
An Integrated Logic Circuit Assembled on a Single Carbon Nanotube journal March 2006
A family of herringbone patterns in thin films journal March 2004
Stiff subcircuit islands of diamondlike carbon for stretchable electronics journal July 2006
Direct observation of electron emission site on boron-doped polycrystalline diamond thin films using an ultra-high-vacuum scanning tunneling microscope journal November 1999
Photoreflectance study of narrow-well strained-layer In x Ga 1 x As/GaAs coupled multiple-quantum-well structures journal August 1988
Bending experiment on pentacene field-effect transistors on plastic films journal February 2005
Emerging Methods for Micro- and Nanofabrication journal July 2001
Multiple Lateral Polysilicon Diodes as Temperature Sensors for Chemical Microreaction Systems journal March 2003
Shadowed sputtering of gold on V -shaped microtrenches etched in silicon and applications in microfabrication journal September 1996
Method and apparatus for transferring blocks patent May 2004
Electronic Textiles Charge Ahead journal August 2003
Patterned Protein Layers on Solid Substrates by Thin Stamp Microcontact Printing journal February 1998
Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites patent-application June 2004
Biaxially Stretchable “Wavy” Silicon Nanomembranes journal June 2007
Nanolithography based on patterned metal transfer and its application to organic electronic devices journal May 2002
Organic transistors manufactured using inkjet technology with subfemtoliter accuracy journal March 2008
Electric-field-directed growth of aligned single-walled carbon nanotubes journal November 2001
Screen Printing Process Design of Experiments for fine line Printing of Thick film Ceramic Substrates journal September 1999
Printable semiconductor structures and related methods of making and assembling patent September 2010
Single crystal silicon arrayed devices with optical shield between transistor and substrate patent November 2001
Microassembly of semiconductor three-dimensional photonic crystals journal January 2003
Ultrathin silicon solar microcells for semitransparent, mechanically flexible and microconcentrator module designs journal October 2008
Percolation in Transparent and Conducting Carbon Nanotube Networks journal December 2004
Single-Crystal CdSe Nanosaws journal December 2003
Apparatus for fabricating self-assembling microstructures patent May 1999
Simple Detachment Patterning of Organic Layers and Its Application to Organic Light-Emitting Diodes journal January 2005
Optics: Electronic eyeballs journal August 2008
Ordered Mesoporous Polymers of Tunable Pore Size from Colloidal Silica Templates journal February 1999
Electric microcontact printing method and apparatus patent-application September 2003
Formation and characterization of silicon films on flexible polymer substrates journal April 2005
High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond journal September 2002
Method for fabricating microstructures with deep anisotropic etching of thick silicon wafers patent September 2004
Synthesis and Optical Properties of CdS Nanoribbons journal October 2005
Semiconductor device and method of manufacturing the same patent-application May 2003
Structures, systems and methods for joining articles and materials and uses therefor patent-application December 2004
Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing journal September 2003
Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching journal October 1993
Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors journal November 2004
Design and Performance of Thin Metal Film Interconnects for Skin-Like Electronic Circuits journal April 2004
High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers journal July 2006
High-Performance Nanowire Electronics and Photonics on Glass and Plastic Substrates journal November 2003
PbSe Nanocrystal Solids for n- and p-Channel Thin Film Field-Effect Transistors journal October 2005
Heterogeneous Three-Dimensional Electronics by Use of Printed Semiconductor Nanomaterials journal December 2006
Bilayer Organic–Inorganic Gate Dielectrics for High-Performance, Low-Voltage, Single-Walled Carbon Nanotube Thin-Film Transistors, Complementary Logic Gates, and p–n Diodes on Plastic Substrates journal December 2006
Surface mount and flip chip technology with diamond film passivation for total integated circuit isolation patent June 1998
Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design journal February 1998
Elastomeric Transistor Stamps: Reversible Probing of Charge Transport in Organic Crystals journal March 2004
All-Inorganic Field Effect Transistors Fabricated by Printing journal October 1999
A buckling-based metrology for measuring the elastic moduli of polymeric thin films journal July 2004
Crystallographic alignment of high-density gallium nitride nanowire arrays journal July 2004
Shape-memory polymer coated electrodes patent-application March 2007
An Orientation-Controlled Pentacene Film Aligned by Photoaligned Polyimide for Organic Thin-Film Transistor Applications journal August 2004
Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology journal December 2003
Recent Advances in Semiconductor Performance and Printing Processes for Organic Transistor-Based Electronics journal October 2004
Excimer laser induced crystallization of amorphous silicon on flexible polymer substrates journal September 2005
Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane) journal March 2007
Thermally-stable low-resistance Ti/Al/Mo/Au multilayer ohmic contacts on n–GaN journal August 2002
Pentacene thin film transistors on inorganic dielectrics: Morphology, structural properties, and electronic transport journal January 2003
Methods and devices for fabricating three-dimensional nanoscale structures patent April 2010
Colloidal nanocrystal synthesis and the organic–inorganic interface journal September 2005
Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates journal July 2009
One-Dimensional Assemblies of Nanoparticles: Preparation, Properties, and Promise journal April 2005
Graded base GaAsSb for high speed GaAs HBT patent August 2004
Systems and methods for transporting particles patent-application May 2006
Complementary carbon nanotube-gated carbon nanotube thin-film transistor journal February 2006
Surface mount and flip chip technology for total integrated circuit isolation patent May 1998
Guided molecular self-assembly: a review of recent efforts journal March 2003
Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables journal January 1979
Shape-and-solder-directed self-assembly to package semiconductor device segments journal October 2004
Inkjet Printing of Polymers: State of the Art and Future Developments journal February 2004
Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap journal June 2003
Terraces and ledges on (001) spinel surfaces journal July 2002
High-Performance Plastic Transistors Fabricated by Printing Techniques journal June 1997
Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy journal August 1991
Polysilicon pillar heat sinks for semiconductor on insulator circuits patent June 2000
Web fabrication of devices patent January 2004
Reworkable high density interconnect structure incorporating a release layer patent July 1995
Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films journal September 2004
Jet nozzle structure for electrohydrodynamic droplet formation and ink jet printing system therewith patent April 1976
Solution–Liquid–Solid Growth of Soluble GaAs Nanowires journal March 2003
High pressure–high temperature growth of diamond crystals using split sphere apparatus journal November 2005
A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering journal July 2003
On the relationship between the temperature coefficient of resistance and the thermal conductance of integrated metal resistors journal October 2004
Screen printed organic thin film transistors (OTFTs) on a flexible substrate conference December 2001
Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy journal December 2002
Vertical Etching of Silicon at very High Aspect Ratios journal August 1979
Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate journal March 2006
Oriented nanostructures and methods of preparing patent-application July 2004
Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth patent November 1977
AlGaAs or InGaP low turn-on voltage GaAs-based heterojunction bipolar transistor patent July 2005
Nanotubes of the disulfides of groups 4 and 5 metals journal January 2002
Thin-film GaAs epitaxial lift-off solar cells for space applications
  • Schermer, J. J.; Mulder, P.; Bauhuis, G. J.
  • Progress in Photovoltaics: Research and Applications, Vol. 13, Issue 7, p. 587-596 https://doi.org/10.1002/pip.616
journal April 2005
Bendable single crystal silicon thin film transistors formed by printing on plastic substrates journal February 2005
CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices journal April 2005
Colloidal nanocrystal heterostructures with linear and branched topology journal July 2004
Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires journal May 2001
Electric-field assisted assembly and alignment of metallic nanowires journal August 2000
Optical Systems Fabricated by Printing-based Assembly patent-application November 2010
Apparatus relating to block configurations and fluidic self-assembly processes patent December 2003
Methods and devices for fabricating and assembling printable semiconductor elements patent November 2009
Scalable Interconnection and Integration of Nanowire Devices without Registration journal May 2004
Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production journal August 2005
Stretchable Interconnects for Elastic Electronic Surfaces journal August 2005
Photovoltaic power generation system patent-application October 2004
Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation journal October 2002
Measurement of nanomechanical resonant structures in single-crystal silicon
  • Carr, D. W.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6, p. 3821-3824 https://doi.org/10.1116/1.590416
journal December 1998
Functional nanoparticle architectures for sensoric, optoelectronic, and bioelectronic applications journal January 2002
Integrated circuit packages assembled utilizing fluidic self-assembly patent July 2002
Thermally transferable image protective sheet, method for protective layer formation, and record produced by said method patent January 2007
Method of making thin silicon sheets for solar cells patent January 2007
Microfabricated structures with trench-isolation using bonded-substrates and cavities patent August 2002
Polymer-controlled growth of Sb2Se3 nanoribbons via a hydrothermal process journal May 2003
Ultrathin Silicon Circuits With Strain-Isolation Layers and Mesh Layouts for High-Performance Electronics on Fabric, Vinyl, Leather, and Paper journal September 2009
Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates journal November 2006
Vapor-liquid-solid mechanism of single crystal growth journal March 1964
Design and Performance of Inkjet Print Heads for Non-Graphic-Arts Applications journal November 2003
Lateral growth of single wall carbon nanotubes on various substrates by means of an “all-laser” synthesis approach journal April 2006
Inkjet Printing of Functional Materials journal November 2003
One-Dimensional Nanostructures: Synthesis, Characterization, and Applications journal March 2003
High-mobility polymer gate dielectric pentacene thin film transistors journal November 2002
Coating system transparent to light and reflecting thermal radiation patent November 1999
Structures of quartz (100)- and (101)-water interfaces determined by x-ray reflectivity and atomic force microscopy of natural growth surfaces journal September 2002
Integrated circuit packages assembled utilizing fluidic self-assembly patent May 2003
Application of carbon nanotubes to field emission displays journal February 2001
Vectorial Growth of Metallic and Semiconducting Single-Wall Carbon Nanotubes journal October 2002
Strained semiconductor by full wafer bonding patent-application January 2005
Analog and digital circuits using organic thin-film transistors on polyester substrates journal November 2000
Experimental and Theoretical Studies of Transport through Large Scale, Partially Aligned Arrays of Single-Walled Carbon Nanotubes in Thin Film Type Transistors journal May 2007
Thermal interface material with carbon nanotubes patent August 2007
3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration journal May 2001
One-dimensional hole gas in germanium/silicon nanowire heterostructures journal July 2005
Methods of positioning and/or orienting nanostructures patent March 2005
Self-assembled single-crystal silicon circuits on plastic journal September 2006
Functionalized silicon membranes for selective bio-organism capture journal April 2003
Collapse of stamps for soft lithography due to interfacial adhesion journal April 2005
Room-Temperature Ultraviolet Nanowire Nanolasers journal June 2001
Stretchable and Foldable Electronic Devices patent-application July 2010
Modulation spectroscopy under uniaxial stress journal June 1973
Conformal diamond coating for thermal improvement of electronic packages patent May 1999
Printed thin-film transistors and complementary logic gates that use polymer-coated single-walled carbon nanotube networks journal December 2005
Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films journal January 2002
Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays journal September 2001
Electrically Induced Optical Emission from a Carbon Nanotube FET journal May 2003
Stability of molded polydimethylsiloxane microstructures journal January 1997
Highly Bendable, Transparent Thin-Film Transistors That Use Carbon-Nanotube-Based Conductors and Semiconductors with Elastomeric Dielectrics journal February 2006
Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains journal October 1995
Conducting elastomer surface texturing: a path to electrode spotting journal September 2004
Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field journal May 1997
Logic Circuits with Carbon Nanotube Transistors journal October 2001
Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes journal March 1998
The path to ubiquitous and low-cost organic electronic appliances on plastic journal April 2004
Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof patent August 2001
Fabrication of a Cylindrical Display by Patterned Assembly journal April 2002
Effect of mismatch strain on band gap in III‐V semiconductors journal June 1985
Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems journal September 2003
Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors journal September 2005
Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays journal December 2000
Performance enhancement of InGaN light-emitting diodes by laser lift-off and transfer from sapphire to copper substrate journal April 2004
Methods of forming two-sided HDMI interconnect structures patent November 1997
Apparatuses and methods used in forming assemblies patent August 2001
Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices journal April 2006
Oxide-Assisted Growth of Semiconducting Nanowires journal April 2003
Composite patterning devices for soft lithography patent March 2007
Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature journal February 2005
Guided Growth of Large-Scale, Horizontally Aligned Arrays of Single-Walled Carbon Nanotubes and Their Use in Thin-Film Transistors journal August 2005
Methods for fabricating a multiple modular assembly patent November 2001
Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure journal December 2002
Improved Pattern Transfer in Soft Lithography Using Composite Stamps journal June 2002
III–V micromachined devices for microsystems journal September 1998
Compliant thin film patterns of stiff materials as platforms for stretchable electronics journal December 2005
Weave Patterned Organic Transistors on Fiber for E-Textiles journal February 2005
Silicon for thin-film transistors journal April 2003
Applications book January 1991
Stretchable gold conductors on elastomeric substrates journal April 2003
Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire journal April 2005
The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors journal July 2005
Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers journal May 2006
Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon journal May 2007
Controlled buckling of semiconductor nanoribbons for stretchable electronics journal December 2006
Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces journal October 2005
III-V compounds for solar cell applications journal June 1999
Templated Self-Assembly: Formation of Folded Structures by Relaxation of Pre-stressed, Planar Tapes journal March 2005
Conductor geometry for electronic circuits fabricated on flexible substrates patent December 2009
Direct measurement of interfacial interactions between semispherical lenses and flat sheets of poly(dimethylsiloxane) and their chemical derivatives journal May 1991
Planar nanowire based sensor elements, devices, systems and methods for using and making same patent-application July 2004
Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography journal March 2003
On-chip natural assembly of silicon photonic bandgap crystals journal November 2001
Method for production of a film patent April 2010
Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates journal October 2004
Transparent flexible organic thin-film transistors that use printed single-walled carbon nanotube electrodes journal March 2006
Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers journal October 1998
Nanowire Transistor Performance Limits and Applications journal November 2008
An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors journal July 1992
Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores journal June 2003
Ballistic carbon nanotube field-effect transistors journal August 2003
The Adhesion Between Polymers journal August 1991
Field-Effect Mobility of Organic Polymer Thin-Film Transistors journal October 2004
Lattice-Oriented Growth of Single-Walled Carbon Nanotubes journal July 2000
Electrospinning of Nanofibers: Reinventing the Wheel? journal July 2004
Stretchable and elastic interconnects patent-application September 2004
Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC journal September 2004
An improved GaAs device model for the simulation of analog integrated circuit journal May 2003
Apparatuses and methods for forming electronic assemblies patent December 2003
Towards woven logic from organic electronic fibres journal April 2007
Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser journal June 2002
Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films journal February 2006
Low emitter resistance contacts to GaAs high speed HBT patent December 2003
An elastomeric conductor based on polyaniline prepared by mechanical mixing journal September 1999
A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal January 1998
Printing Patterns of Proteins journal April 1998
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates journal July 2003
Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties journal December 2000
Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants journal January 1989
Amorphous Si TFTs on plastically deformed spherical domes journal April 2002
Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts journal January 2003
Flexible Nanotube Electronics journal October 2003
Interconnect structure for electronic devices patent February 2004
Nanotube films and articles patent March 2004
Electrical contacts for flexible displays patent March 2005
Mesoscale organization of metal nanocrystals journal January 2002
Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures journal July 2004
Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation journal January 2003
Invention of the integrated circuit journal July 1976
Method of anisotropically etching silicon patent March 1996
Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates journal November 2004
Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts journal February 2004
Water-degradable electrode patent June 1995
Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors journal August 2004
Laser-lithography on non-planar surfaces journal January 2007
Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths journal October 1998
A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems journal October 2005
Direct Observation of Vapor−Liquid−Solid Nanowire Growth journal April 2001
Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons journal March 2005
The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives journal July 1998
Functional Pixel Circuits for Elastic AMOLED Displays journal July 2005
Low-Temperature Deposition of Hydrogenated Amorphous Silicon in an Electron Cyclotron Resonance Reactor for Flexible Displays journal July 2005
Contact Electrification and Adhesion Between Dissimilar Materials journal April 1992
Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) journal June 2002
Finer features for functional microdevices journal August 2001
Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling journal March 2008
Development of Dendrimers:  Macromolecules for Use in Organic Light-Emitting Diodes and Solar Cells journal April 2007
Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper journal January 2009
Anodization and Microcontact Printing on Electroless Silver: Solution-Based Fabrication Procedures for Low-Voltage Electronic Systems with Organic Active Components journal July 2000
Trench etch process for a single-wafer RIE dry etch reactor patent August 1989
Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species journal August 2001
Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices patent-application January 2004
Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates journal October 2005
Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) journal October 1998
High-Efficiency Multijunction Solar Cells journal March 2007
Multispectral Plasmonic Crystal Sensors patent-application September 2008
Electronic materials: Buckling down for flexible electronics journal December 2006
Universal description of channel conductivity for nanotube and nanowire transistors journal August 2003
Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers journal November 2000
Laser based fast prototyping methodology of producing stretchable and conformable electronic systems conference September 2008
Step and flash imprint lithography patent January 2002
Beyond molecules: Self-assembly of mesoscopic and macroscopic components journal April 2002
Elastically relaxed free-standing strained-silicon nanomembranes journal April 2006
The rise of graphene journal March 2007
Amorphous silicon technology for large area digital X-ray and optical imaging journal April 2002
Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks journal August 2004
Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing journal February 2003
Devices and methods for pattern generation by ink lithography patent-application March 2008
Split-fabrication for light emitting display structures patent January 2005
InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications journal March 1991
Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates journal June 1994
Steps and the structure of the (0001) α-alumina surface journal January 1997
Flexible displays patent October 2003
Stretchable form of single crystal silicon for high performance electronics on rubber substrates patent April 2009
Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry journal April 2002
Mechanics of rollable and foldable film-on-foil electronics journal February 1999
Vertically oriented GaN-based air-gap distributed Bragg reflector structure fabricated using band-gap-selective photoelectrochemical etching journal August 2005
Unconventional Methods for Fabricating and Patterning Nanostructures journal May 1999
Magnetic trapping and self-assembly of multicomponent nanowires journal May 2002
Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates journal April 2005
Techniques for layer transfer processing patent-application April 2005
Molecule-Mimetic Chemistry and Mesoscale Self-Assembly journal December 2000
GaN: Processing, defects, and devices journal July 1999
Flat display patent August 1994
Attachment method for assembly of high density multiple interconnect structures patent December 1999
Compliant substrate technology: Integration of mismatched materials for opto-electronic applications journal January 2000
Flexible display designed for minimal mechanical strain patent-application June 2006
High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors journal March 2004
High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions journal May 2000
Template Synthesis of Electronically Conductive Polymer Nanostructures journal February 1995
Free standing single-crystal silicon microstructures journal March 1995
Carbon Nanotube Inter- and Intramolecular Logic Gates journal September 2001
Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes journal June 2000
Macroelectronics journal June 2006
Organic single-crystal field-effect transistors journal May 2004
Lateral growth of aligned mutilwalled carbon nanotubes under electric field journal May 2003
Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases journal December 1996
Protective diamond-like carbon coatings for future optical storage disks journal March 2005
Fabrication of Stable Metallic Patterns Embedded in Poly(dimethylsiloxane) and Model Applications in Non-Planar Electronic and Lab-on-a-Chip Device Patterning journal April 2005
Single-crystalline gallium nitride nanobelts journal July 2002
Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing journal October 2004
Luminescence Photophysics in Semiconductor Nanocrystals journal November 1998
Bonded intermediate substrate and method of making same patent-application November 2006
Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions journal March 1994
Semiconductor nanotube formation by a two-step template process journal October 1996
High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856 https://doi.org/10.1116/1.1523405
journal September 2002
Composite patterning devices for soft lithography patent-application October 2005
Trench etch process for a single-wafer RIE dry etch reactor patent November 1988
Temperature coefficient of the surface resistivity of two-dimensional island gold films journal September 2000
Mechanical properties of silicones for MEMS journal April 2008
A Rubberlike Stretchable Active Matrix Using Elastic Conductors journal September 2008
Magnetoplasmadynamic apparatus and process for the separation and deposition of materials patent September 1984
Mountable microstructure and optical transmission apparatus patent May 2004
Surface mountable flexible interconnect patent July 1999
Displays combining active and non-active inks patent October 2002
Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements journal October 2009
Nanotube Molecular Wires as Chemical Sensors journal January 2000
Architectonic Quantum Dot Solids journal January 1999
Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping journal March 2000
The formation of controlled-porosity membranes from anodically oxidized aluminium journal January 1989
High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction journal August 1993
Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration journal May 2005
Cooling system for a semiconductor device and method of fabricating same patent April 2006
A hemispherical electronic eye camera based on compressible silicon optoelectronics journal August 2008
Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher journal January 1999
Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems journal March 2007
Backplanes for display applications, and components for use therein patent October 2006
Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics patent-application July 2008
Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws journal October 2004
Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric journal June 2001
Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures journal November 2004
Distributed LED-Based Light Source patent-application March 2011
Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes journal August 2005
From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach journal November 2004
Surface plasmon polariton band gap structures patent-application February 2002
Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates journal July 2008
Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells journal October 2003
Active matrix substrate and method of manufacturing the same patent May 2003
Organic electronics on paper journal April 2004
Magnetic self-assembly of three-dimensional surfaces from planar sheets journal March 2005
Finite deformation mechanics in buckled thin films on compliant supports journal September 2007
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689 https://doi.org/10.1116/1.591259
journal April 2000
The Chemistry and Physics of Semiconductor Nanowires journal February 2005
Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation journal December 2004
Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates journal March 2005
Microporous materials: Electrochemically grown photonic crystals journal December 1999
Gallium Oxide Nanoribbons and Nanosheets journal February 2002
Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors journal August 2005
Method for fabricating self-assembling microstructures patent July 1998
Chemical Etching Characteristics of (001)GaAs journal January 1983
Ordering of microwrinkle patterns by compressive strain journal April 2004
Organic species that facilitate charge transfer to or from nanostructures patent September 2005
Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics journal July 2002
High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film journal July 2001
Cooling system for a semiconductor device and method of fabricating same patent January 2007
Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes journal February 1999
Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique journal May 2003
Low-Temperature Materials and Thin Film Transistors for Flexible Electronics journal August 2005
Creating micro- and nanostructures on tubular and spherical surfaces
  • Lima, O.; Tan, L.; Goel, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418 https://doi.org/10.1116/1.2804428
journal December 2007
Mixed Mode Cracking in Layered Materials book January 1991
Growth and properties of nanocrystalline diamond films journal October 2006
Mold release layer transferring film and laminate film patent August 2007
Processing dependent behavior of soft imprint lithography on the 1-10-nm scale journal May 2006
High-performance organic thin-film transistors with metal oxide/metal bilayer electrode journal November 2005
Stretchable semiconductor elements and stretchable electrical circuits patent July 2009
High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes journal March 2007
Heat-transfer-stamp process for thermal imprint lithography patent September 2005
Wafer-level in-registry microstamping journal March 1999
Looking at Rubber Adhesion journal March 1979
Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787 https://doi.org/10.1021/ja0523791
journal August 2005
Aluminum metallization—Advantages and limitations for integrated circuit applications journal January 1969
Direct synthesis and characterization of CdS nanobelts journal July 2006
Process for producing a semiconductor device having a single thermal oxidizing step patent June 1999
High-mobility thin-film transistors based on aligned carbon nanotubes journal July 2003
Printing meets lithography: Soft approaches to high-resolution patterning journal September 2001
Printable Semiconductor Structures and Related Methods of Making and Assembling patent-application November 2010
Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer journal November 1999
Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras conference September 2004
Morphology of nanostructured materials journal January 2002
Molecular control over Au/GaAs diodes journal March 2000
Stamp for a lithographic process patent October 1998
Thermal transport and grain boundary conductance in ultrananocrystalline diamond thin films journal June 2006
Nanostructure and nanocomposite based compositions and photovoltaic devices patent April 2005
Method of transferring devices, method of arranging devices using the same, and method of manufacturing an image display system patent-application October 2005
Methods and apparatuses for improved flow in performing fluidic self assembly patent March 2003
Apparatuses and methods for flexible displays patent February 2005
Electronic paper: Flexible active-matrix electronic ink display journal May 2003
Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates patent-application March 2010
Polarized Raman Spectroscopy on Isolated Single-Wall Carbon Nanotubes journal December 2000
High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper journal September 2008
Diamond-structured photonic crystals journal September 2004
Ambipolar Pentacene Field-Effect Transistors and Inverters journal February 2000
Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates journal June 1998
Crystallographic wet chemical etching of GaN journal November 1998
Flexible membrane pressure sensor journal April 2005
p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks journal October 2004
RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology journal December 2007
Lateral polysilicon p+–p–n+ and p+–n–n+ diodes journal April 2003
Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics journal January 2007
Organic Transistors: Two-Dimensional Transport and Improved Electrical Characteristics journal April 1995
Organic light-emitting diodes formed by soft contact lamination journal January 2004
Over 30% efficient InGaP/GaAs tandem solar cells journal January 1997
Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics journal July 2005
Diamond heat spreading and cooling technique for integrated circuits patent November 2006
Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator journal March 1994
A New Etching Solution System, H3 PO4- H2O2- H2O, for GaAs and Its Kinetics journal January 1978
A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications journal June 2004
Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires journal October 2003
From Micro- to Nanofabrication with Soft Materials journal November 2000
Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics journal July 2008
High-Current Nanotube Transistors journal May 2004
The Characteristic Improvement of Si(111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing journal October 2004
Polymer-Polymer Phase Behavior journal February 1991
Bendable GaAs metal-semiconductor field-effect transistors formed with printed GaAs wire arrays on plastic substrates journal August 2005
Methods for creating elements of predetermined shape and apparatus using these elements patent July 2003
Nanotube Optoelectronic Memory Devices journal September 2004
Adherence, friction and wear of rubber-like materials journal October 1992
Detection and ablation of localized shunting defects in photovoltaics patent-application October 2007
Free-standing, optically pumped, GaN∕InGaN microdisk lasers fabricated by photoelectrochemical etching journal November 2004
Surface mount and flip chip technology for total integrated circuit isolation patent May 1998
High voltage low current surface emitting LED patent-application October 2010
Individually Suspended Single-Walled Carbon Nanotubes in Various Surfactants journal October 2003
Tandem photovoltaic cell stacks patent-application October 2004
Controlled growth of tetrapod-branched inorganic nanocrystals journal May 2003
Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond journal April 2005
High-Performance n- and p-Type Single-Crystal Organic Transistors with Free-Space Gate Dielectrics journal December 2004
Light Output Device patent-application June 2010
Electroform spring built on mandrel transferable to other surface patent-application April 2006
Diffusion of Alkanethiols in PDMS and Its Implications on Microcontact Printing (μCP) journal January 2005
Silicon nanowire devices journal April 2000
Quantifying distortions in soft lithography
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 88-97 https://doi.org/10.1116/1.589841
journal June 1998
High efficiency GaAs thin film solar cells by peeled film technology journal December 1978
Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress technique
  • Miller, Scott M.; Troian, Sandra M.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2320-2327 https://doi.org/10.1116/1.1520554
journal September 2002
Bipolar transistor with lattice matched base layer patent March 2007
Improved Surface Chemistries, Thin Film Deposition Techniques, and Stamp Designs for Nanotransfer Printing journal August 2004
Plastic transistors in active-matrix displays journal December 2001
Low-Temperature Polycrystalline Silicon Thin-Film Transist or Technologies for System-on-Glass Displays journal November 2002
High-Resolution Inkjet Printing of All-Polymer Transistor Circuits journal December 2000
Analysis of In0.07Ga0.93As layers on GaAs compliant substrates by double crystal x-ray diffraction journal March 1997
Hole mobility in organic single crystals measured by a “flip-crystal” field-effect technique journal August 2004
Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask
  • Rogers, John A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1, p. 59-68 https://doi.org/10.1116/1.589836
journal June 1998
High-Field Electrical Transport in Single-Wall Carbon Nanotubes journal March 2000
Nanotechnology: Thin solid films roll up into nanotubes journal March 2001
Stretchable wavy metal interconnects
  • Jones, Joyelle; Lacour, Stephanie P.; Wagner, Sigurd
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 22, Issue 4, p. 1723-1725 https://doi.org/10.1116/1.1756879
journal July 2004
Radio frequency analog electronics based on carbon nanotube transistors journal January 2008
Supercritical Fluid–Liquid–Solid Synthesis of Gallium Arsenide Nanowires Seeded by Alkanethiol-Stabilized Gold Nanocrystals journal April 2004
Super-fine ink-jet printing: toward the minimal manufacturing system journal October 2005
Patterning of Thin-Film Microstructures on Non-Planar Substrate Surfaces Using Decal Transfer Lithography journal August 2004
Anomalous Coiling of SiGe/Si and SiGe/Si/Cr Helical Nanobelts journal July 2006
Three-Dimensional Nanofabrication with Rubber Stamps and Conformable Photomasks journal August 2004
Surface Modification of Sylgard-184 Poly(dimethyl siloxane) Networks by Ultraviolet and Ultraviolet/Ozone Treatment journal October 2002
Ink jet printhead and method of making patent August 1998
Synthesis of horizontally-aligned single-walled carbon nanotubes with controllable density on sapphire surface and polarized Raman spectroscopy journal April 2006
Structure and photoluminescence of ZnSe nanoribbons grown by metal organic chemical vapor deposition journal April 2004
Nanomaterial transfer using hot embossing for flexible electronic devices journal February 2006
Mechanical resistance of a single-crystal silicon wafer patent June 2003
Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates journal February 2002
Fabrication of Metal Nanowires Using Microcontact Printing journal July 2003
Methods and apparatus for fluidic self assembly patent September 2003
Nonlinear analyses of wrinkles in a film bonded to a compliant substrate journal September 2005
Flexible active-matrix displays and shift registers based on solution-processed organic transistors journal January 2004
Self-aligned self-assembly process for fabricating organic thin-film transistors journal September 2004
Microcontact Printing of Alkanephosphonic Acids on Aluminum: Pattern Transfer by Wet Chemical Etching journal February 1999
Imprint lithography utilizing room temperature embossing patent November 2004
Heterogeneous materials integration: compliant substrates to active device and materials packaging journal December 2001
Low resistance Pd/Ge/Au and Ge/Pd/Au ohmic contacts to n ‐type GaAs journal February 1986
Transplanted magnetic random access memory (MRAM) devices on thermally-sensitive substrates using laser transfer and method for making the same patent-application December 2004
All-Polymer Field-Effect Transistor Realized by Printing Techniques journal September 1994
Alpha-particle protection of semiconductor devices patent August 1988
New Realization Method for Three-Dimensional Photonic Crystal in Optical Wavelength Region journal July 1996
AlGaN/GaN HEMTs-an overview of device operation and applications journal June 2002
Direct-connect signaling system patent-application December 2003
Two-versus three-dimensional quantum confinement in indium phosphide wires and dots journal July 2003
Fabrication of solid-state nanopores with single-nanometre precision journal July 2003
Directional assembly of carbon nanotube strings patent May 2005
A flexible and wearable glucose sensor based on functional polymers with Soft-MEMS techniques journal October 2006
Method of transferring devices, method of arranging devices using the same, and method of manufacturing an image display system patent-application May 2003
Mechanically Strained Strained-Si NMOSFETs journal January 2004
Nanoscale Hydrophobic Recovery: A Chemical Force Microscopy Study of UV/Ozone-Treated Cross-Linked Poly(dimethylsiloxane) journal February 2004
Angular displacement sensors patent February 1992
Method for making bonded metal back-plane substrates patent May 2000
Air-Stable All-Inorganic Nanocrystal Solar Cells Processed from Solution journal October 2005
Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors journal October 1997
Electric Field Effect in Atomically Thin Carbon Films journal October 2004
GaAs Readied for High-Speed Microcircuits journal January 1983
Fully elastic interconnects on nanopatterned elastomeric substrates journal August 2006
Methods and devices for fabricating three-dimensional nanoscale structures patent-application December 2006
Disposing method for semiconductor elements patent April 2004
Nanoscale Science and Technology: Building a Big Future from Small Things journal July 2003
Stars and stripes. Nanoscale misfit dislocation patterns on surfaces journal January 2002
Methods to fabricate thin film transistors and circuits patent May 2001
Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses journal August 2005
Electronic devices with small functional elements supported on a carrier patent November 2004
Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography journal April 2003
A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates journal January 2006
Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires journal February 2002
Colloidal Inks for Directed Assembly of 3-D Periodic Structures journal July 2002
Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment journal April 2006
A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions journal December 2003
Structures of indium oxide nanobelts journal October 2003
Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors journal November 2005
Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification journal August 1998
Amorphous silicon crystallization and polysilicon thin film transistors on SiO2 passivated steel foil substrates journal May 2001
Tailored Micropatterns through Weak Polyelectrolyte Stamping journal March 2003
Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter journal May 1997
Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps journal October 2004
Active matrix type display device and method of manufacturing the same patent-application April 2006
Surface-functionalized inorganic semiconductor particles as electrical semiconductors for microelectronics applications patent-application December 2003
Patterning of diamond microstructures on Si substrate by bulk and surface micromachining journal January 2003
Stretchable semiconductor elements and stretchable electrical circuits patent-application February 2006
Ink-Jet Printing of Binders for Ceramic Components journal April 2002
Atomic Force Microscopy of Atomic-Scale Ledges and Etch Pits Formed During Dissolution of Quartz journal March 1991
A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates patent-application December 2006
An Elastically Stretchable TFT Circuit journal December 2004
Nanowire heterostructures for encoding information patent-application February 2004
Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors journal November 2005
Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs patent August 2004
Printed Assemblies of Ultrathin, Microscale Inorganic Light Emitting Diodes for Deformable and Semitransparent Displays patent-application December 2010
Magnetoplasmadynamic apparatus for the separation and deposition of materials patent December 1984
Pixel integrated circuit patent August 2003
Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution journal August 2004
Nanotube electronics: Large-scale assembly of carbon nanotubes journal September 2003
Double-metal background driven displays patent July 2003
Method for preventing distortions in a flexibly transferred feature pattern patent December 2003
Mechanism for stamp collapse in soft lithography journal December 2005
Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon journal January 2002
Nanotechnology: High-speed integrated nanowire circuits journal April 2005
Free-standing Single Crystal Silicon Nanoribbons journal November 2001
Toward Paperlike Displays journal February 2001
Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination journal July 2002
System and method of transferring dies using an adhesive surface patent February 2005
III–nitrides: Growth, characterization, and properties journal February 2000
Sequential shape-and-solder-directed self-assembly of functional microsystems journal August 2004
Method of manufacturing semiconductor device patent-application November 2005
Flexible a-Si:H Position-Sensitive Detectors journal July 2005
Atomic-Step-Templated Formation of Single Wall Carbon Nanotube Patterns journal November 2004
Siloxane Polymers for High-Resolution, High-Accuracy Soft Lithography journal April 2000
Interfacial Chemistries for Nanoscale Transfer Printing journal July 2002
High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates journal July 2005
Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates journal May 2003
Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires journal January 2005
Flexible electronic assembly patent-application February 2008
Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off journal July 2006
Holographic photonic crystals with diamond symmetry journal November 2003
High-κ dielectrics for advanced carbon-nanotube transistors and logic gates journal November 2002
A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell journal January 2004
Multispectral plasmonic crystal sensors patent April 2010
Extraordinary Mobility in Semiconducting Carbon Nanotubes journal January 2004
Printed plastic electronics and paperlike displays journal August 2002
Solution-Liquid-Solid Growth of Crystalline III-V Semiconductors: An Analogy to Vapor-Liquid-Solid Growth journal December 1995
Stretchable interconnects using stress gradient films patent June 2004
Stretchable and Foldable Silicon Integrated Circuits journal April 2008
Fabrication of strained heterojunction structures patent-application June 2006
Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons journal October 2005
Spherical deformation of compliant substrates with semiconductor device islands journal January 2004
Photonic Band Gap Architectures for Holographic Lithography journal January 2004
Functionally symmetric integrated circuit die patent September 2001
Nature of electrical contacts in a metal–molecule–semiconductor system
  • Hsu, J. W. P.; Loo, Y. L.; Lang, D. V.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 4, p. 1928-1935 https://doi.org/10.1116/1.1588641
journal March 2003
Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes journal October 2004
An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication journal May 2002
Effects of Mechanical Strain on TFTs on Spherical Domes journal March 2004
High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach journal January 2003
Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics journal November 2007
III-nitride blue microdisplays journal February 2001
Improved field emission properties from metal-coated diamond films journal March 2007
Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors journal January 2005
Sharp exciton emission from single InAs quantum dots in GaAs nanowires journal September 2003
A review of 3-D packaging technology
  • Al-Sarawi, S. F.; Abbott, D.; Franzon, P. D.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B, Vol. 21, Issue 1, p. 2-14 https://doi.org/10.1109/96.659500
journal February 1998
Ge/Si nanowire heterostructures as high-performance field-effect transistors journal May 2006
Process for fabricating organic semiconductor device involving selective patterning patent June 2002
Current–Voltage Characteristics of Long-Channel Nanobundle Thin-Film Transistors: A “Bottom-Up” Perspective journal February 2007
Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles journal November 2002
Control of Si Nanowire Growth by Oxygen journal June 2006
Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits journal January 2005
Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations journal November 2008
Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates journal November 2002
In-line fabrication of curved surface transistors patent-application June 2006
Method and apparatus for fabricating self-assembling microstructures patent March 2005
Nanotransfer printing by use of noncovalent surface forces: Applications to thin-film transistors that use single-walled carbon nanotube networks and semiconducting polymers journal December 2004
Micron and submicron patterning of polydimethylsiloxane resists on electronic materials by decal transfer lithography and reactive ion-beam etching: Application to the fabrication of high-mobility, thin-film transistors journal October 2006
High-mobility ultrathin semiconducting films prepared by spin coating journal March 2004
Diamond semiconductor technology for RF device applications journal July 2005
Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces journal April 2002
High-mobility carbon-nanotube thin-film transistors on a polymeric substrate journal January 2005
Surface-induced structure formation of polymer blends on patterned substrates journal February 1998
Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings patent November 2002
Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors journal October 1999
Nanoribbon Waveguides for Subwavelength Photonics Integration journal August 2004
Heat spreader and semiconductor device and package using the same patent June 2006
Embedded thermal conductors for semiconductor chips patent September 1999
Strained semiconductor by full wafer bonding patent-application November 2006
Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition journal October 2004
Process for producing photonic crystals patent-application June 2005
Electronic skin: architecture and components journal November 2004
Large area, high resolution, dry printing of conducting polymers for organic electronics journal January 2003
Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes journal March 2005
Organic and polymer transistors for electronics journal April 2006
Field emission from carbon nanotubes for displays journal April 2000
Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners journal November 2005
Mesoscopic self‐assembly of gold islands on diblock‐copolymer films journal January 1994
Patterning Self-Assembled Monolayers: Applications in Materials Science journal May 1994
Organic Light-Emitting Devices for Solid-State Lighting journal July 2008
Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly journal August 2005
Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon journal January 2008
Evaluation of polydimethylsiloxane scaffolds with physiologically-relevant elastic moduli: interplay of substrate mechanics and surface chemistry effects on vascular smooth muscle cell response journal June 2005
Ordering of Spontaneously Formed Buckles on Planar Surfaces journal April 2000
Patterning organic–inorganic thin-film transistors using microcontact printed templates journal November 2001
Transfer printing by kinetic control of adhesion to an elastomeric stamp journal December 2005
Micro-lens arrays for display intensity enhancement patent January 2006
Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
  • Yurekli, Koray; Mitchell, Cynthia A.; Krishnamoorti, Ramanan
  • Journal of the American Chemical Society, Vol. 126, Issue 32, p. 9902-9903 https://doi.org/10.1021/ja047451u
journal August 2004
Nanowire Arrays Defined by Nanoimprint Lithography journal April 2004
Large Area Submicrometer Contact Printing Using a Contact Aligner journal June 2000
The mechanics of electronic materials journal September 1999
Fluidic Heterogeneous Microsystems Assembly and Packaging journal August 2006
Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes journal April 2004
Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters journal July 1996
An analytical back-gate bias effect model for ultrathin SOI CMOS devices journal April 1993
Variable drop mass inkjet drop generator patent August 2001
Apparatuses and methods for forming electronic assemblies patent March 2005
Large-scale complementary integrated circuits based on organic transistors journal February 2000
Chemical Etching of InGaAsP/InP DH Wafer journal January 1982
Micromachining on (111)-oriented silicon journal June 1999
Cheap and cheerful circuits journal September 2000
InGaN nanorings and nanodots by selective area epitaxy journal October 2005
Nanostructured advanced materials. Perspectives and directions journal January 2002
Plastic Electronics and Their Packaging Technologies journal April 2003
Process and apparatus for continuous production of lightweight arrays of photovoltaic cells patent May 1987
Macroelectronics: Perspectives on Technology and Applications journal July 2005
High Frequency Properties of Electro-Textiles for Wearable Antenna Applications journal February 2008
Low-voltage organic transistors with an amorphous molecular gate dielectric journal October 2004
Semiconductor wafer having a thin die and tethers and methods of making the same patent August 2003
Epitaxy/substrate release layer patent April 2006
Bulk Quantities of Single-Crystal Silicon Micro-/Nanoribbons Generated from Bulk Wafers journal October 2006
Screen printing for the fabrication of organic light-emitting devices journal January 2001
Field Configured Assembly: Programmed Manipulation and Self-assembly at the Mesoscale journal May 2004
Nanobelts of Semiconducting Oxides journal March 2001
Silicon motherboards for multichannel optical modules
  • Ambrosy, A.; Richter, H.; Hehmann, J.
  • IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A, Vol. 19, Issue 1, p. 34-40 https://doi.org/10.1109/95.486559
journal March 1996
Optimization, Constraint, and History in the Evolution of Eyes journal September 1990
Methods for forming assemblies patent August 2001
Preparation of Macroporous Metal Films from Colloidal Crystals journal September 1999
Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays journal August 2009
Microscopic patterning of orientated mesoscopic silica through guided growth journal December 1997
Thermal dissipation of integrated circuits using diamond paths patent May 1994
Printed Multilayer Superstructures of Aligned Single-Walled Carbon Nanotubes for Electronic Applications journal November 2007
Method of selective removal of SiGe alloys patent May 2005
Directed Assembly of One-Dimensional Nanostructures into Functional Networks journal January 2001
High Performance Electrolyte Gated Carbon Nanotube Transistors journal August 2002
Methods for creating elements of predetermined shape and apparatuses using these elements patent July 2002
Low-voltage and high-field-effect mobility organic transistors with a polymer insulator journal February 2006
Method of fabrication of stacked semiconductor devices patent January 2006
Light active sheet and methods for making the same patent-application September 2005
Variation in the effective richardson constant of metal—GaAs and Metal—InP contacts due to the effect of processing parameters journal November 1993
Degradation mechanism of diethylene glycol units in a terephthalate polymer journal April 2006
Room-temperature deposition of high-purity silicon oxide films by RF plasma-enhanced CVD journal September 2001
Deformable organic devices patent-application August 2006
Method and apparatus for fabricating self-assembling microstructures patent October 1998
High-performance all-polymer integrated circuits journal September 2000
Using printing and molding techniques to produce distributed feedback and Bragg reflector resonators for plastic lasers journal September 1998
Thermal transfer recording material and thermal transfer recording method patent September 2008
Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp patent-application August 2009
Electronic transport in nanometre-scale silicon-on-insulator membranes journal February 2006
Random networks of carbon nanotubes as an electronic material journal March 2003
Free-standing and vertically aligned InP nanowires grown by metalorganic vapor phase epitaxy journal March 2004
High Performance n-Type Carbon Nanotube Field-Effect Transistors with Chemically Doped Contacts journal February 2005
Microoptical sensor and method patent October 1995
High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes journal January 1995
Engineering Carbon Nanotubes and Nanotube Circuits Using Electrical Breakdown journal April 2001
Band Gap Fluorescence from Individual Single-Walled Carbon Nanotubes journal July 2002
Testing integrated circuit dice patent April 2002
Electrochemical device patent January 2007
Self-Assembly of Mesoscale Objects into Ordered Two-Dimensional Arrays journal April 1997
High-resolution electrohydrodynamic jet printing journal August 2007
Large-Area, Selective Transfer of Microstructured Silicon: A Printing- Based Approach to High-Performance Thin-Film Transistors Supported on Flexible Substrates journal October 2005
Method and apparatus for coating medical implants patent-application February 2007
Semiconductor nanowires for novel one-dimensional devices journal March 2004
Van der Waals bonding of GaAs epitaxial liftoff films onto arbitrary substrates journal June 1990
Aligned growth of isolated single-walled carbon nanotubes programmed by atomic arrangement of substrate surface journal June 2005
The Incredible Shrinking Circuit journal September 2001
Semiconductor Clusters, Nanocrystals, and Quantum Dots journal February 1996
Percolating Conduction in Finite Nanotube Networks journal August 2005
Synthetic Chemistry for Ultrapure, Processable, and High-Mobility Organic Transistor Semiconductors journal March 2001
High-Resolution Contact Printing with Dendrimers journal April 2002
Stress focusing for controlled fracture in microelectromechanical systems journal February 2007
Some properties of spherical and rod-shaped semiconductor and metal nanocrystals journal January 2002
Biological applications of high aspect ratio nanoparticles journal January 2004
Batch manufacturing method for photovoltaic cells patent November 2001
Multi-feature-size electronic structures patent August 2003
Method of utilizing a contact printing stamp patent May 2008
High on-state breakdown heterojunction bipolar transistor patent-application March 2006
Control of the Degradation of Diodegradable Implants using a Coating patent-application August 2009
Controlled deposition of individual single-walled carbon nanotubes on chemically functionalized templates journal April 1999
Selective wet-etching of microcontact-printed Cu substrates with control over the etch profile journal June 2003
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM journal December 2000
Conversion of Zinc Oxide Nanobelts into Superlattice-Structured Nanohelices journal September 2005
Process method of using excimer laser for forming micro spherical and non-spherical polymeric structure array patent-application August 2002