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Title: Gas cushion control of OVJP print head position

An OVJP apparatus and method for applying organic vapor or other flowable material to a substrate using a printing head mechanism in which the print head spacing from the substrate is controllable using a cushion of air or other gas applied between the print head and substrate. The print head is mounted for translational movement towards and away from the substrate and is biased toward the substrate by springs or other means. A gas cushion feed assembly supplies a gas under pressure between the print head and substrate which opposes the biasing of the print head toward the substrate so as to form a space between the print head and substrate. By controlling the pressure of gas supplied, the print head separation from the substrate can be precisely controlled.
Authors:
Publication Date:
OSTI Identifier:
1160215
Report Number(s):
8,851,597
13/807,878
DOE Contract Number:
SC0002122
Resource Type:
Patent
Research Org:
The Regents of the University of Michigan, Ann Arbor, MI (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE