Method to fabricate micro and nano diamond devices
Patent
·
OSTI ID:1160137
A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- 8,852,998
- Application Number:
- 13/598,152
- OSTI ID:
- 1160137
- Resource Relation:
- Patent File Date: 2012 Aug 29
- Country of Publication:
- United States
- Language:
- English
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