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Title: Standardization of Methods for Extracting Statistics from Surface Profile Measurements

Authors:
Publication Date:
OSTI Identifier:
1159730
Report Number(s):
BNL--105894-2014-CP
KA-04
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Conference
Resource Relation:
Conference: 2014 SPIE Optics + Photonics; San Diego, CA; 20140817 through 20140821
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
SOCIETY OF PHOTONIC INSTRUMENTATION ENGINEERS (SPIE)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY