Angular Distribution and Recoil Effect for 1 MeV Au+ Ions through a Si3N4 Thin Foil
Abstract
The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ~100 nm. The exiting Au ions are collected by a Si wafer located ~14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ~107 atom/ion.
- Authors:
-
- Univ. of Tennessee, Knoxville, TN (United States)
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
- Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Publication Date:
- Research Org.:
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States). Environmental Molecular Sciences Lab. (EMSL)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1158468
- Report Number(s):
- PNNL-SA-98255
Journal ID: ISSN 0168-583X; 47459; KP1704020
- DOE Contract Number:
- AC05-76RL01830
- Resource Type:
- Journal Article
- Journal Name:
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Additional Journal Information:
- Journal Volume: 332; Journal ID: ISSN 0168-583X
- Publisher:
- Elsevier
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 74 ATOMIC AND MOLECULAR PHYSICS; Environmental Molecular Sciences Laboratory
Citation Formats
Jin, Ke, Zhu, Zihua, Manandhar, Sandeep, Liu, Jia, Chen, Chien-Hung, Shutthanandan, V., Thevuthasan, Suntharampillai, Weber, William J., and Zhang, Yanwen. Angular Distribution and Recoil Effect for 1 MeV Au+ Ions through a Si3N4 Thin Foil. United States: N. p., 2014.
Web. doi:10.1016/j.nimb.2014.02.093.
Jin, Ke, Zhu, Zihua, Manandhar, Sandeep, Liu, Jia, Chen, Chien-Hung, Shutthanandan, V., Thevuthasan, Suntharampillai, Weber, William J., & Zhang, Yanwen. Angular Distribution and Recoil Effect for 1 MeV Au+ Ions through a Si3N4 Thin Foil. United States. https://doi.org/10.1016/j.nimb.2014.02.093
Jin, Ke, Zhu, Zihua, Manandhar, Sandeep, Liu, Jia, Chen, Chien-Hung, Shutthanandan, V., Thevuthasan, Suntharampillai, Weber, William J., and Zhang, Yanwen. 2014.
"Angular Distribution and Recoil Effect for 1 MeV Au+ Ions through a Si3N4 Thin Foil". United States. https://doi.org/10.1016/j.nimb.2014.02.093.
@article{osti_1158468,
title = {Angular Distribution and Recoil Effect for 1 MeV Au+ Ions through a Si3N4 Thin Foil},
author = {Jin, Ke and Zhu, Zihua and Manandhar, Sandeep and Liu, Jia and Chen, Chien-Hung and Shutthanandan, V. and Thevuthasan, Suntharampillai and Weber, William J. and Zhang, Yanwen},
abstractNote = {The Stopping and Range of Ions in Matter (SRIM) code has been widely used to predict nuclear stopping power and angular distribution of ion-solid collisions. However, experimental validation of the predictions is insufficient for slow heavy ions in nonmetallic compounds. In this work, time-of-flight secondary ion mass spectrometry (ToF-SIMS) is applied to determine the angular distribution of 1 MeV Au ions after penetrating a Si3N4 foil with a thickness of ~100 nm. The exiting Au ions are collected by a Si wafer located ~14 mm behind the Si3N4 foil, and the resulting 2-dimensional distribution of Au ions on the Si wafer is measured by ToF-SIMS. The SRIM-predicted angular distribution of Au ions through the Si3N4 thin foil is compared with the measured results, indicating that SRIM slightly overestimates the nuclear stopping power by up to 10%. In addition, thickness reduction of the suspended Si3N4 foils induced by 1 MeV Au ion irradiation is observed with an average loss rate of ~107 atom/ion.},
doi = {10.1016/j.nimb.2014.02.093},
url = {https://www.osti.gov/biblio/1158468},
journal = {Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms},
issn = {0168-583X},
number = ,
volume = 332,
place = {United States},
year = {Tue Mar 18 00:00:00 EDT 2014},
month = {Tue Mar 18 00:00:00 EDT 2014}
}