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Title: High-precision micro/nano-scale machining system

A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.
Authors:
; ;
Publication Date:
OSTI Identifier:
1150741
Report Number(s):
8,806,995
12/877,863
DOE Contract Number:
FG02-07ER46453; FG02-04ER46471
Resource Type:
Patent
Research Org:
University of Illinois, Urbana, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING