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Title: Improved SEM Resolution Through the Use of Image Restoration Techniques

Authors:
 [1] ;  [1] ;  [2] ;  [2] ;  [3] ;  [4]
  1. 1College of Nanoscale Science and Engineering, SUNYIT
  2. Nanojehm Inc
  3. College of Computer Science, UAlbany
  4. Los Alamos National Laboratory
Publication Date:
OSTI Identifier:
1149976
Report Number(s):
LA-UR-14-26423
DOE Contract Number:
AC52-06NA25396
Resource Type:
Conference
Resource Relation:
Conference: Microscopy & Microanalysis 2014 Meeting ; 2014-08-03 - 2014-08-03 ; Hartford, Connecticut, United States
Research Org:
Los Alamos National Laboratory (LANL)
Sponsoring Org:
Private Company
Country of Publication:
United States
Language:
English
Subject:
Mathematics & Computing(97); Nanoscience & Nanotechnology(77)