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Title: Integration of Atomic Layer Deposition CeO2 Thin Films with Functional Complex Oxides and 3D Patterns

Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [1] ;  [1]
  1. ICMAB, Barcelona, Spain
  2. Institut de Ciència de Materials de Barcelona, ICMAB-CSIC, Bellaterra, Spain
Publication Date:
OSTI Identifier:
1149773
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: Thin Solid Films; Journal Volume: 553
Research Org:
Oak Ridge National Laboratory (ORNL); Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
SC USDOE - Office of Science (SC)
Country of Publication:
United States
Language:
English