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Title: SEM Through Dielectric Membranes: Secondary Electron Contrast Reversal

Authors:
 [1] ;  [2] ;  [2]
  1. ORNL
  2. Protochips Inc., Raleigh, NC
Publication Date:
OSTI Identifier:
1149758
DOE Contract Number:
DE-AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Conference: Microscopy & Microanalysis 2014, Hartford, CT, USA, 20140803, 20140803
Research Org:
Oak Ridge National Laboratory (ORNL)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English