skip to main content

SciTech ConnectSciTech Connect

Title: Gas feeding molecular phosphorous ion source for semiconductor implanters

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1143626
Report Number(s):
BNL--105501-2014-JA
R&D Project: KBCH139; 18033; KB0202011
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Conference: 15th International conference on Ion Sources (ICIS 13); Chiba, Japan; 20130909 through 20130913
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS