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Title: Development of the ion source for cluster implantation

Authors:
; ; ; ; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1143617
Report Number(s):
BNL--105491-2014-JA
R&D Project: KBCH139; 18033; KB0202011
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 85; Conference: 15th International Conference on Ion Sources (ICIS 13); Chiba, Japan; 20130909 through 20130913
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS