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Title: CHARACTERIZATION OF SOI MEMS SIDEWALL ROUGHNESS.

Abstract not provided.
Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1143500
Report Number(s):
SAND2011-6672C
482043
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Conference: Proposed for presentation at the ASME 2011 International Mechanical Engineering Congress & Exposition held November 11-17, 2011 in Denver, CO.
Research Org:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English