High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1141155
- Report Number(s):
- SAND2014-2351C; 505921
- Resource Relation:
- Journal Volume: 2014; Journal Issue: HITEC; Conference: Proposed for presentation at the International Conference on High Temperature Electronics held May 13-15, 2014 in Albuquerque, NM.
- Country of Publication:
- United States
- Language:
- English
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