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Title: High Temperature Microelectromechanical Systems Using Piezoelectric Aluminum Nitride.

Abstract not provided.
Authors:
; ;
Publication Date:
OSTI Identifier:
1141155
Report Number(s):
SAND2014-2351C
Journal ID: ISSN 2380--4491; 505921
DOE Contract Number:
AC04-94AL85000
Resource Type:
Conference
Resource Relation:
Journal Volume: 2014; Journal Issue: HITEC; Conference: Proposed for presentation at the International Conference on High Temperature Electronics held May 13-15, 2014 in Albuquerque, NM.
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
USDOE National Nuclear Security Administration (NNSA)
Country of Publication:
United States
Language:
English