Off-Normal Patterned Etching Through Suspended Membranes.

Burckel, David Bruce; Resnick, Paul James; Henry, Michael David; Finnegan, Patrick Sean

Title: Off-Normal Patterned Etching Through Suspended Membranes.

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Abstract

Abstract not provided.

Authors:: Burckel, David Bruce; Resnick, Paul James; Henry, Michael David; Finnegan, Patrick Sean

Publication Date:: Wed Jan 01 00:00:00 EST 2014

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1140777

Report Number(s):: SAND2014-0767C
498657

DOE Contract Number:: AC04-94AL85000

Resource Type:: Conference

Resource Relation:: Conference: Proposed for presentation at the SPIE Photonics West held February 2-6, 2014 in San Francisco, CA.

Country of Publication:: United States

Language:: English

Citation Formats


                    Burckel, David Bruce, Jarecki, Robert L.,, Resnick, Paul James, Henry, Michael David, and Finnegan, Patrick Sean. Off-Normal Patterned Etching Through Suspended Membranes..  United States: N. p., 2014. 
        Web.

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                    Burckel, David Bruce, Jarecki, Robert L.,, Resnick, Paul James, Henry, Michael David, & Finnegan, Patrick Sean. Off-Normal Patterned Etching Through Suspended Membranes..  United States.

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                    Burckel, David Bruce, Jarecki, Robert L.,, Resnick, Paul James, Henry, Michael David, and Finnegan, Patrick Sean. 2014.  
        "Off-Normal Patterned Etching Through Suspended Membranes.".  United States.  https://www.osti.gov/servlets/purl/1140777.

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@article{osti_1140777,

  title        = {Off-Normal Patterned Etching Through Suspended Membranes.},

  author       = {Burckel, David Bruce and Jarecki, Robert L., and Resnick, Paul James and Henry, Michael David and Finnegan, Patrick Sean},

  abstractNote = {Abstract not provided.},

  doi          = {},

  url          = {https://www.osti.gov/biblio/1140777},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Wed Jan 01 00:00:00 EST 2014},

  month        = {Wed Jan 01 00:00:00 EST 2014}

}

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