skip to main content

Title: Microcantilever-based gas sensor employing two simultaneous physical sensing modes

According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.
Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1134683
Report Number(s):
8,762,075
12/852,416
DOE Contract Number:
AC52-07NA27344
Resource Type:
Patent
Research Org:
LLNL (Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION