skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Transparent conducting oxides and production thereof

Patent ·
OSTI ID:1133958
; ;

Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Number(s):
8,747,630
Application Number:
12/130,788
OSTI ID:
1133958
Country of Publication:
United States
Language:
English

References (38)

Transparent conductive film having areas of high and low resistivity patent July 1983
Manufacturing method of semiconductor device patent June 1999
Photovoltaic devices comprising cadmium stannate transparent conducting films and method for making patent July 1999
Transparent conductive film, sputtering target and transparent conductive film-bonded substrate patent March 2000
Process for fabricating polycrystalline semiconductor thin-film solar cells, and cells produced thereby patent October 2000
Photovoltaic devices comprising zinc stannate buffer layer and method for making patent January 2001
Photovoltaic device patent January 2001
Thin transparent conducting films of cadmium stannate patent April 2001
Zirconia-containing transparent and conducting oxides patent June 2001
Ion-beam treatment to prepare surfaces of p-CdTe films patent August 2001
Transparent conductive film of zinc oxide patent May 2003
Semiconductor photonic device patent August 2003
Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby patent January 2004
Incontinence treatment with urethral guide patent February 2004
ZnO film, method for manufacturing the same, and luminescent element including the same patent May 2004
Transparent electroconductive film and touch panel patent September 2004
Method for manufacturing zinc oxide semiconductors patent February 2005
High carrier concentration p-type transparent conducting oxide films patent June 2005
Transparent electrode, optoelectronic apparatus and devices patent August 2005
Patterned ceramic films and method for producing the same patent July 2006
Transparent conductive oxides for plastic flat panel displays patent March 2007
Zinc oxide-based transparent conductor and sputtering target for forming the transparent conductor patent April 2010
Zirconium-doped zinc oxide structures and methods patent June 2010
Gallium nitride based II-V group compound semiconductor device patent-application March 2002
Transparent conductive thin film, process for producing the same, sintered target for producing the same, and transparent, electroconductive substrate for display panel, and organic electroluminescence device patent-application November 2003
Compound semiconductor material and method for forming an active layer of a thin film transistor device patent-application March 2005
Sputtered Transparent Conductive Films patent-application June 2006
Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same patent-application January 2007
Method for depositing zinc oxide at low temperatures and products formed thereby patent-application May 2007
Method for Producing High Carrier Concentration P-Type Transparent Conducting Oxides patent-application May 2008
Compound semiconductor material and method for forming an active layer of a thin film transistor device patent-application December 2008
Zinc Oxide Ceramics and a Manufacturing Method for the same, a Sputtering Target patent-application August 2009
Transparent Conducting Oxides and Production Thereof patent-application December 2009
High Quality Doped ZnO Thin Films patent-application July 2010
Non-Metallic Mandrel and Element System patent-application November 2010
Transparent Conducting Oxides and Production Thereof patent-application April 2011
Amorphous Tin-Cadmium Oxide Films and the Production Thereof patent-application August 2011
Transparent Conducting Oxide Films With Improved Properties patent-application April 2012

Cited By (1)

Thin film photovoltaic devices with a minimally conductive buffer layer patent November 2016

Similar Records

Related Subjects

36 MATERIALS SCIENCE