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Title: Atomic layer deposition of quaternary chalcogenides

Methods and systems are provided for synthesis and deposition of chalcogenides (including Cu.sub.2ZnSnS.sub.4). Binary compounds, such as metal sulfides, can be deposited by alternating exposures of the substrate to a metal cation precursor and a chalcogen anion precursor with purge steps between.
Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1133663
Report Number(s):
8,741,386
13/631,135
DOE Contract Number:
AC02-06CH11357
Resource Type:
Patent
Research Org:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE