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Title: Transparent conducting oxides and production thereof

Patent ·
OSTI ID:1133452
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Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target (110) doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber (100). The method may also comprise depositing a metal oxide on the target (110) to form a thin film having enhanced optical properties without substantially decreasing electrical quality.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Number(s):
8,734,621
Application Number:
11/718,628
OSTI ID:
1133452
Resource Relation:
Patent File Date: 2007 Jan 16
Country of Publication:
United States
Language:
English

References (9)

Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same patent-application January 2007
Gallium nitride based II-V group compound semiconductor device patent-application March 2002
Patterned ceramic films and method for producing the same patent July 2006
Transparent conductive film having areas of high and low resistivity patent July 1983
Methods of obtaining photoactive coatings and/or anatase crystalline phase of titanium oxides and articles made thereby patent January 2004
High carrier concentration p-type transparent conducting oxide films patent June 2005
Transparent conductive film, sputtering target and transparent conductive film-bonded substrate patent March 2000
Transparent conductive thin film, process for producing the same, sintered target for producing the same, and transparent, electroconductive substrate for display panel, and organic electroluminescence device patent-application November 2003
Transparent electrode, optoelectronic apparatus and devices patent August 2005

Cited By (1)

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36 MATERIALS SCIENCE