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Title: Substrate inspection

Various embodiments for substrate inspection are provided.
Authors:
; ;
Publication Date:
OSTI Identifier:
1132598
Report Number(s):
8,736,831
13/472,421
DOE Contract Number:
EE0003159
Resource Type:
Patent
Resource Relation:
Patent File Date: 2012 May 15
Research Org:
KLA-Tencor Corporation, Milpitas, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE