skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Anti-reflective nanoporous silicon for efficient hydrogen production

Patent ·
OSTI ID:1132050

Exemplary embodiments are disclosed of anti-reflective nanoporous silicon for efficient hydrogen production by photoelectrolysis of water. A nanoporous black Si is disclosed as an efficient photocathode for H.sub.2 production from water splitting half-reaction.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-08GO28308
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Number(s):
8,729,798
Application Number:
13/284,861
OSTI ID:
1132050
Resource Relation:
Patent File Date: 2011 Oct 28
Country of Publication:
United States
Language:
English

References (96)

Optically black coating and process for forming it patent September 1978
Process and apparatus for producing non-glare glass by etching patent March 1993
Superconducting detector and method of making same patent November 1993
Photonic silicon on a transparent substrate patent July 2000
Micromechanical membrane tilt-mirror switch patent January 2001
Derivatization of silicon surfaces patent September 2001
Metal catalyst technique for texturing silicon solar cells patent December 2001
Electrophoretic displays using nanoparticles patent March 2003
Electrophoretic displays using nanoparticles patent April 2004
Method of fabricating a semiconductor device patent July 2004
Metal-assisted chemical etch to produce porous group III-V materials patent July 2004
Metal-assisted chemical etch porous silicon formation method patent September 2004
Electroless deposition method patent May 2005
Electroless deposition method patent June 2005
Photoelectrochemical device and electrode patent May 2006
Lithography-based patterning of layer-by-layer nano-assembled thin films patent August 2006
Method for producing multicrystalline silicon substrate for solar cells patent November 2006
Method of fabricating a semiconductor device patent November 2006
Methods of selective deposition of fine particles onto selected regions of a substrate patent January 2009
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device patent September 2009
Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same patent May 2010
Method for producing silicon substrate for solar cells patent November 2011
Methods of selective deposition of fine particles onto selected regions of a substrate patent November 2011
Nanoparticle-based etching of silicon surfaces patent December 2011
Method of manufacturing solar cell patent February 2012
Method of fabricating solar cell patent February 2012
Method for forming silicon trench patent June 2012
Method for producing silicon nanostructures patent December 2012
Method of forming nanoscale three-dimensional patterns in a porous material patent July 2013
Method of fabricating a semiconductor device patent-application June 2002
Systems and methods for forming processing streams patent-application August 2002
Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation patent-application September 2002
Electrophoretic displays using nanoparticles patent-application October 2002
Electrophoretic displays using nanoparticles patent-application May 2003
Method for raw etching silicon solar cells patent-application June 2003
Electroless deposition method patent-application October 2003
Spatial light modulators with light absorbing areas patent-application May 2014
Spatial Light Modulators With Light Blocking/absorbing Areas patent-application May 2004
Method of fabricating a semiconductor device patent-application December 2004
Methods of nanostructure formation and shape selection patent-application March 2005
Method for producing multicrystalline silicon substrate for solar cells patent-application May 2005
Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device patent-application June 2005
Devices and methods for enhanced microneedle penetration of biological barriers patent-application June 2005
Self-assembled structures patent-application December 2005
Method for forming high-resolution pattern with direct writing means patent-application December 2006
Method for forming high-resolution pattern and substrate having prepattern formed thereby patent-application December 2006
Method and Device for Modulating Light patent-application May 2007
Method of fabricating semiconductor device patent-application June 2007
Light Emitting Device patent-application July 2007
Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS) patent-application July 2007
Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels patent-application July 2007
Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials patent-application August 2007
Method for Patterning Metal Using Nanoparticle Containing Precursors patent-application August 2007
Methods for producing MEMS with protective coatings using multi-component sacrificial layers patent-application September 2007
Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS) patent-application October 2007
Novel Nanoparticle Patterning Process patent-application December 2007
Solar hydrogen charger patent-application January 2009
Solar cell, method of manufacturing the same, and method of texturing solar cell patent-application July 2009
Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions patent-application September 2009
Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same patent-application December 2009
Conversion of Carbon Dioxide to Organic Products patent-application July 2010
Metal-Assisted Chemical Etching of Substrates patent-application September 2010
Method for preparing substrate with periodical structure patent-application October 2010
Silicon substrate with periodical structure patent-application October 2010
High-Productivity Porous Semiconductor Manufacturing Equipment patent-application February 2011
Method of fabricating solar cell patent-application June 2011
Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces patent-application December 2011
Solae Energy Systems patent-application February 2012
Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate patent-application April 2012
Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production patent-application May 2012
Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces patent-application July 2012
Texturing Surface of Light Absorbing Substrate patent-application September 2012
Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures patent-application February 2013
Design and characterization of a robust photoelectrochemical device to generate hydrogen using solar water splitting journal September 2006
Photoelectrochemical Behavior of n-Type Porous-Si Electrodes journal July 1986
Hydrogen generation from photoelectrochemical water splitting based on nanomaterials journal September 2009
Porous silicon in solar cells: A review and a description of its application as an AR coating journal April 1995
Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching journal January 2011
Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles journal February 2006
Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst journal January 2006
Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle journal August 2008
10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth journal October 2009
>16% thin-film epitaxial silicon solar cells on 70-cm 2 area with 30-µm active layer, porous silicon back reflector, and Cu-based top-contact metallization : Silicon solar cells, silicon reflector, metallization journal September 2011
Black multi-crystalline silicon solar cells journal March 2007
Black nonreflecting silicon surfaces for solar cells journal May 2006
Selective Solar-Driven Reduction of CO 2 to Methanol Using a Catalyzed p-GaP Based Photoelectrochemical Cell journal May 2008
Solution-Processable Graphene Oxide as an Efficient Hole Transport Layer in Polymer Solar Cells journal June 2010
Toward Solar Fuels: Photocatalytic Conversion of Carbon Dioxide to Hydrocarbons journal February 2010
Effective Utilization of Visible Light (Including λ > 600 nm) in Phenol Degradation with p-Silicon Nanowire/TiO 2 Core/Shell Heterojunction Array Cathode journal October 2009
Nanostructured black silicon and the optical reflectance of graded-density surfaces journal June 2009
Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules journal September 2009
Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells journal September 2011
Metal-assisted electrochemical etching of silicon journal October 2010
Patterning of various silicon structures via polymer lithography and catalytic chemical etching journal May 2011
Metal-assisted chemical etching in HF/H2O2 produces porous silicon journal October 2000
Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle journal January 2007

Cited By (1)


Similar Records

Related Subjects