Ovenized microelectromechanical system (MEMS) resonator

Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

Title: Ovenized microelectromechanical system (MEMS) resonator

Patent · Tue Mar 11 00:00:00 EDT 2014

OSTI ID:1126693

Olsson, Roy H; Wojciechowski, Kenneth; Kim, Bongsang

An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Number(s):: 8,669,823

Application Number:: 13/442,689

OSTI ID:: 1126693

Country of Publication:: United States

Language:: English

References (28)

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Microelectromechanical resonator and method for fabrication Wittwer, Jonathan W.; Olsson, Roy H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7616077 US Patent Document 7,616,077	patent	November 2009
Microelectromechanical resonator and method for fabrication Wittwer, Jonathan W.; Olsson, Roy H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7652547 US Patent Document 7,652,547	patent	January 2010
Microfabricated bulk wave acoustic bandgap device Olsson, Roy H.; El-Kady, Ihab F.; McCormick, Jr., Frederick B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7733198 US Patent Document 7,733,198	patent	June 2010
Microfabricated bulk wave acoustic bandgap device Olsson, Roy H.; El-Kady, Ihab F.; McCormick, Jr., Frederick B. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7836566 US Patent Document 7,836,566	patent	November 2010
Microfabricated ion frequency standard Schwindt, Peter; Biedermann, Grant; Blain, Matthew G. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7859350 US Patent Document 7,859,350	patent	December 2010
Phononic crystal devices El-Kady, Ihab F.; Olsson, Roy H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8094023 US Patent Document 8,094,023	patent	January 2012
Method for fabricating a microelectromechanical resonator Wojciechowski, Kenneth; Olsson, Roy H. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8367305 US Patent Document 8,367,305	patent	February 2013
Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators Wojciechowski, Kenneth; Olsson, Roy H.; Ziaei-Moayyed, Maryam https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8497747 US Patent Document 8,497,747	patent	July 2013
Synthetic thermoelectric materials comprising phononic crystals El-Kady, Ihab F.; Olsson, Roy H.; Hopkins, Patrick E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8508370 US Patent Document 8,508,370	patent	August 2013
Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material Olsson, Roy H.; El-Kady, Ihab F.; Ziaei-Moayyed, Maryam https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8525619 US Patent Document 8,525,619	patent	September 2013
Micromechanical resonator device and method of making a micromechanical device Nguyen, Clark T. -C.; Abdelmoneum, Mohamed A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20040207492 US Patent Application 10/737363; 20040207492	patent-application	October 2004
Methods and Apparatus for Temperature Control of Devices and Mechanical Resonating Structures Schoepf, Klaus Juergen; Rebel, Reimund https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100315179 US Patent Application 12/781076; 20100315179	patent-application	December 2010
Thermal Conductivity of AlN and SiC Thin Films Choi, Sun Rock; Kim, Dongsik; Choa, Sung-Hoon International Journal of Thermophysics, Vol. 27, Issue 3 https://doi.org/10.1007/s10765-006-0062-1	journal	May 2006
Technologies for Cofabricating MEMS and Electronics Fedder, G. K.; Howe, R. T. Proceedings of the IEEE, Vol. 96, Issue 2 https://doi.org/10.1109/JPROC.2007.911064	journal	February 2008
Frequency Trimming for MEMS Resonator Oscillators Hsu, Wan-Thai; Brown, Andrew. R. 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum https://doi.org/10.1109/FREQ.2007.4319247	conference	May 2007
Fully monolithic CMOS nickel micromechanical resonator oscillator 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems https://doi.org/10.1109/MEMSYS.2008.4443580	conference	January 2008
Thermal Isolation of Encapsulated MEMS Resonators Jha, C. M.; Hopcroft, M. A.; Chandorkar, S. A. Journal of Microelectromechanical Systems, Vol. 17, Issue 1 https://doi.org/10.1109/JMEMS.2007.904332	journal	February 2008
Thermal Conductivity Measurement of Submicron-Thick Films Deposited on Substrates by Modified ac Calorimetry (Laser-Heating Ångstrom Method) Kato, R.; Maesono, A.; Tye, R. P. International Journal of Thermophysics, Vol. 22, Issue 2, p. 617-629 https://doi.org/10.1023/A:1010745603645	journal	January 2001
Ovenized and thermally tunable aluminum nitride microresonators Kim, Bongsang; Olsson, Roy H.; Wojciechowski, Kenneth E. 2010 IEEE International Ultrasonics Symposium https://doi.org/10.1109/ULTSYM.2010.5935635	conference	October 2010
Oven-Based Thermally Tunable Aluminum Nitride Microresonators Kim, Bongsang; Nguyen, Janet; Wojciechowski, Kenneth E. Journal of Microelectromechanical Systems, Vol. 22, Issue 2, p. 265-275 https://doi.org/10.1109/JMEMS.2012.2235821	journal	April 2013
Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E. 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum https://doi.org/10.1109/FREQ.2007.4319108	conference	May 2007
VHF and UHF mechanically coupled aluminum nitride MEMS filters Olsson, Roy H.; Washburn, Cody M.; Stevens, James E. 2008 IEEE International Frequency Control Symposium https://doi.org/10.1109/FREQ.2008.4623077	conference	May 2008
Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P. Journal of Microelectromechanical Systems, Vol. 16, Issue 2, p. 319-328 https://doi.org/10.1109/JMEMS.2006.889503	journal	April 2007
Micro ion frequency standard Schwindt, Peter D. D.; Jau, Yuan-Yu; Partner, Heather SPIE Defense, Security, and Sensing, SPIE Proceedings https://doi.org/10.1117/12.885268	conference	May 2011
Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators Wojciechowski, K. E.; Olsson, R. H.; Tuck, M. R. Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International https://doi.org/10.1109/SENSOR.2009.5285626	conference	June 2009
Super high frequency width extensional aluminum nitride (AlN) MEMS resonators Wojciechowski, K. E.; Olsson, R. H.; Nordquist, C. D. 2009 IEEE International Ultrasonics Symposium https://doi.org/10.1109/ULTSYM.2009.5441802	conference	September 2009
Pulsed photothermal reflectance measurement of the thermal conductivity of sputtered aluminum nitride thin films Zhao, Yimin; Zhu, Chunlin; Wang, Sigen Journal of Applied Physics, Vol. 96, Issue 8 https://doi.org/10.1063/1.1785850	journal	October 2004

Cited By (7)

Method of making thermally-isolated silicon-based integrated circuits Wojciechowski, Kenneth; Olsson, Roy H.; Clews, Peggy J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9824932 US Patent Document 9,824,932	patent	November 2017
Thermally-isolated silicon-based integrated circuits and related methods Wojciechowski, Kenneth; Olsson, Roy H.; Clews, Peggy J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9646874 US Patent Document 9,646,874	patent	May 2017
Single crystal micromechanical resonator Olsson, Roy H.; Friedmann, Thomas A.; Jensen Homeijer, Sara https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9641154 US Patent Document 9,641,154	patent	May 2017
Methods for dry etching semiconductor devices Bauer, Todd; Gross, Andrew John; Clews, Peggy J. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9484216 US Patent Document 9,484,216	patent	November 2016
Temperature stabilized circuitry Lukashevich, Dzianis https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9287831 US Patent Document 9,287,831	patent	March 2016
Tuning method for microresonators and microresonators made thereby Henry, Michael David; Olsson, Roy H.; Greth, Karl Douglas https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9203134 US Patent Document 9,203,134	patent	December 2015
Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator Inaba, Shogo; Yamada, Akinori; Yajima, Aritsugu https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9154109 US Patent Document 9,154,109	patent	October 2015

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