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Title: Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system

Authors:
; ; ; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1123645
Report Number(s):
BNL--103737-2014-JA
KC0403020
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology B; Journal Volume: 31
Research Org:
Brookhaven National Laboratory (BNL) Center for Functional Nanomaterials
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY EUV lithography; Talbot interference; functional nanomaterials