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Title: FEL Oscillator for EUV Lithography

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1122486
Report Number(s):
SLAC-PUB-15900
DOE Contract Number:
AC02-76SF00515
Resource Type:
Conference
Resource Relation:
Conference: Presented at the Mini-workshop on High Power FEL Source for EUV Lithography, Jan 23-24, 2014, Santa Monica, CA, USA
Research Org:
SLAC National Accelerator Laboratory (SLAC)
Sponsoring Org:
US DOE Office of Science (DOE SC);DE-AC02-05CH11231
Country of Publication:
United States
Language:
English
Subject:
ACCPHY, XFEL