FEL Oscillator for EUV Lithography
Conference
·
OSTI ID:1122486
- Research Organization:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC); DE-AC02-05CH11231
- DOE Contract Number:
- AC02-76SF00515
- OSTI ID:
- 1122486
- Report Number(s):
- SLAC-PUB-15900
- Resource Relation:
- Conference: Presented at the Mini-workshop on High Power FEL Source for EUV Lithography, Jan 23-24, 2014, Santa Monica, CA, USA
- Country of Publication:
- United States
- Language:
- English
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