skip to main content

Title: Reactive ion etching: Optimized diamond membrane fabrication for transmission electron microscopy

Authors:
;
Publication Date:
OSTI Identifier:
1120537
Report Number(s):
BNL--103747-2014-JA
KC0403020
DOE Contract Number:
DE-AC02-98CH10886
Resource Type:
Journal Article
Resource Relation:
Journal Name: JOURNAL OF VACUUM SCIENCE and TECHNOLOGY B; Journal Volume: 31; Journal Issue: 6
Research Org:
Brookhaven National Laboratory (BNL)
Sponsoring Org:
USDOE SC OFFICE OF SCIENCE (SC)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE