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Title: Low temperature junction growth using hot-wire chemical vapor deposition

A system and a process for forming a semi-conductor device, and solar cells (10) formed thereby. The process includes preparing a substrate (12) for deposition of a junction layer (14); forming the junction layer (14) on the substrate (12) using hot wire chemical vapor deposition; and, finishing the semi-conductor device.
Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1118271
Report Number(s):
8,642,450
12/742,001
DOE Contract Number:
AC36-99GO10337
Resource Type:
Patent
Resource Relation:
Patent File Date: 2007 Nov 09
Research Org:
NREL (National Renewable Energy Laboratory (NREL), Golden, CO (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY