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Title: Test surfaces useful for calibration of surface profilometers

The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer.
Authors:
; ;
Publication Date:
OSTI Identifier:
1113535
Report Number(s):
8,616,044
12/408,508
DOE Contract Number:
AC02-05CH11231; AC02-98CH10886
Resource Type:
Patent
Research Org:
BNL (Brookhaven National Laboratory (BNL), Upton, NY (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION