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Title: Physics-based signal processing algorithms for micromachined cantilever arrays

A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.
Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1108966
Report Number(s):
8,584,506
11/435,495
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Patent
Research Org:
LLNL (Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
97 MATHEMATICS AND COMPUTING