skip to main content

Title: Process and structures for fabrication of solar cells with laser ablation steps to form contact holes

Contact holes of solar cells are formed by laser ablation to accomodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thickness.
Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1108939
Report Number(s):
8,586,403
13/028,059
DOE Contract Number:
FC36-07GO17043
Resource Type:
Patent
Research Org:
SunPower Corporation (San Jose, CA)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY