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Title: Stable wafer-carrier system

One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.
Authors:
; ;
Publication Date:
OSTI Identifier:
1107612
Report Number(s):
8,562,745
12/963,445
DOE Contract Number:
EE0000589
Resource Type:
Patent
Research Org:
Silevo, Inc. (Fremont, CA)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING