Stable wafer-carrier system
Patent
·
OSTI ID:1107612
One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.
- Research Organization:
- Silevo, Inc. (Fremont, CA)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0000589
- Assignee:
- Silevo, Inc. (Fremont, CA)
- Patent Number(s):
- 8,562,745
- Application Number:
- 12/963,445
- OSTI ID:
- 1107612
- Country of Publication:
- United States
- Language:
- English
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