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Title: Additives to silane for thin film silicon photovoltaic devices

Chemical additives are used to increase the rate of deposition for the amorphous silicon film (.alpha.Si:H) and/or the microcrystalline silicon film (.mu.CSi:H). The electrical current is improved to generate solar grade films as photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices.
Authors:
; ; ;
Publication Date:
OSTI Identifier:
1093446
Report Number(s):
8,535,760
12/872,806
DOE Contract Number:
EE0000580
Resource Type:
Patent
Research Org:
Air Products and Chemicals, Inc. (Allentown, PA)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY