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Title: Micro gas-puff based source

Authors:
;
Publication Date:
OSTI Identifier:
1092950
Report Number(s):
8,530,854
13/647,970
DOE Contract Number:
AC04-94AL85000
Resource Type:
Patent
Research Org:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY