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Title: RF-MEMS capacitive switches with high reliability

A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.
Authors:
; ; ; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1092767
Report Number(s):
8,525,185
13/081,683
DOE Contract Number:
FG02-02ER46016
Resource Type:
Patent
Research Org:
CHO (Chicago Operations Office, Argonne, IL (United States))
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING