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Title: Atmospheric Pressure Chemical Vapor Deposition of High Silica SiO 2-TiO 2 Antireflective Thin Films for Glass Based Solar Panels

The atmospheric pressure chemical vapor deposition (APCVD) of SiO 2-TiO 2 thin films employing [[(tBuO) 3Si] 2O-Ti(OiPr) 2], which can be prepared from commercially available materials, results in antireflective thin films on float glass under industrially relevant manufacturing conditions. It was found that while the deposition temperature had an effect on the SiO 2:TiO 2 ratio, the thickness was dependent on the time of deposition. This study shows that it is possible to use APCVD employing a single source precursor containing titanium and silicon to produce thin films on float glass with high SiO 2:TiO 2 ratios.
 [1] ;  [1] ;  [2] ;  [2] ;  [1]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  2. Solar Performance Group, PPG Industries, Cheswick, PA (United States)
Publication Date:
OSTI Identifier:
DOE Contract Number:
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Materials Chemistry. C; Journal Volume: 1; Journal Issue: 41
Royal Society of Chemistry
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
Country of Publication:
United States