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Title: Remote Plasma-Deposited Geo (2) with Quartz-Like Geo-And O-Local Bonding: Band-Edge State and O-Vacancy Comparisons with Sio (2)

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1091559
Report Number(s):
SLAC-REPRINT-2013-554
DOE Contract Number:
AC02-76SF00515
Resource Type:
Journal Article
Resource Relation:
Journal Name: Microelectron. Eng 88:1537,2011
Research Org:
SLAC National Accelerator Laboratory (SLAC)
Sponsoring Org:
US DOE Office of Science (DOE SC)
Country of Publication:
United States
Language:
English
Subject:
CHEM